光刻系统实验教学平台搭建及课程开展  

Construction of platform on lithography experimental teaching and the course development

作　　者：王奇[1] 刘勐[2] 汪家奇[2] WANG Qi;LIU Meng;WANG Jia-qi(Sehoot of Physics and Optoeleetronie Engineering;National Demonstration School of Mieroelee- tronies, Dalian University of Technology, Dalian 116023, China)

机构地区：[1]大连理工大学物理与光电工程学院,辽宁大连116023 [2]大连理工大学国家示范性微电子学院,辽宁大连116023

出　　处：《实验室科学》2017年第6期10-12,15,共4页Laboratory Science

基　　金：国家自然科学基金青年基金"射频辅助脉冲电源驱动同轴介质阻挡放电脱除NOx的数值模拟研究"(项目编号:11405022);大连市高层次人才创新支持计划项目(项目编号:2016RQ020)

摘　　要：目前我国高校开展的光刻教学课程主要集中在加工原理方面,普遍缺乏配合理论知识学习的实际工艺操作实验。大连理工大学国家级示范性微电子学院自主设计、搭建了光刻实验平台以满足学生学习实践的需要。介绍了光刻实验平台系统的设备模块构成以及知识体系,开展实验的前期准备、课堂组织、注意事项。此外,给出了部分结果,分析了课程实施的主要困难与解决方案。The teaching courses in lithography process are mainly focus on the principle and technology of processing in common universities.In paper,the construction of system platform on lithography process designed by the National Demonstration School of Microelectronics in Dalian University of Technology is introduced.The knowledge system,the experiment preparation,the course organization and the precautions are all represented.The results are demonstrated;the main problems and corresponding solutions are analyzed.

关 键 词：光刻系统平台 集成电路技术 实验设计 

分 类 号：TN305.7[电子电信—物理电子学] TN405