卫星用高精度压力传感器研究  

Research on High Precision Pressure Sensor Used in Satellite

作　　者：付新菊[1] 关威[1] 

机构地区：[1]北京控制工程研究所,北京100094

出　　处：《仪表技术与传感器》2018年第2期151-153,共3页Instrument Technique and Sensor

摘　　要：针对卫星用压阻式压力传感器存在温度漂移误差的问题,提出在传感器内部压力芯片处嵌入高精度温度传感器,使传感器具备压力、温度一体化测量和标定的功能。通过曲面拟合,采用最小二乘法完成对压力传感器的标定补偿工作,将压力传感器的测量精度提高到0.041 8%。In order to solve temperature drift error of the piezoresistive pressure sensor used on satellite application,high-pre-cision temperature sensor embedded at the pressure chip was proposed,so that the piezoresistive pressure sensor has the ability ofpressure / temperature integrate measurement and calibration. The curve surface fitting method by using the least-square methodwas used to complete calibration compensated work of the pressure sensor,which increased the pressure sensor measurement ac-curacy to 0.041 8%.

关 键 词：曲面拟合 误差补偿 高精度 

分 类 号：V441[航空宇航科学与技术—飞行器设计]