基于电容位移传感器与金属球的三维定位方法与实验研究  

Three-dimensional Positioning Method Based on Capacitive Displacement Sensor and Metal Ball and Experiment Research

作　　者：陶鑫 袁道成[1,2] 李少博 

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621000 [2]西安交通大学机械工程学院,陕西西安710049

出　　处：《仪表技术与传感器》2018年第2期166-170,179,共6页Instrument Technique and Sensor

基　　金：中物院超精密加工技术重点实验室资助项目(K914-14-JCZ)

摘　　要：文中提出一种基于电容位移传感器测量金属球的非接触三维定位方法。通过理论与实验方法研究了定位精度的影响因素,发现定位精度与传感器的参数、金属球球径、传感器与金属球表面之间的距离等参数有关。通过优化参数设计实验,采用CSH02FL-CRm1,4电容式微位移传感器获得了小于2μm的x、y方向定位精度,小于0.1μm的z方向定位精度。This paper presented a three-dimensional positioning method based on a capacitive displacement sensor and ametal ball. Theory and experiments showed that the positioning accuracy was determined by several parameters,including the pa-rameter of the capacitive displacement sensor,the diameter of the metal ball and the thickness of the gap between the sensor andthe ball. Through optimizing the parameters,using CSH02FL-CRm1,4 capacitive displacement sensor,positioning accuracy wasachieved which is less than 2 μm in x,y direction and less than 0.1 μm in z direction.

关 键 词：三维定位 非接触 电容位移传感器 

分 类 号：TH711[机械工程—测试计量技术及仪器]