复杂腔体件表面磁控溅射镀膜关键技术的研究  

Study on the key technology of magnetron sputtering coating on the surface of complex cavity part

作　　者：王德山[1] 陈尤旭 胡兵兵[1] 

机构地区：[1]苏州大学机电工程学院,江苏苏州215131

出　　处：《现代机械》2018年第1期80-83,共4页Modern Machinery

基　　金：江苏省基础研究计划(自然科学基金)面上研究项目"多轮廓型腔结构件磁控溅射类金刚石碳膜附着机理研究";编号:BK20151220

摘　　要：多轮廓型腔结构件具有复杂的内腔,采用化学镀膜方法在对工件内腔镀膜过程中存在膜基结合力差、薄膜厚度不均匀致密、内腔死角无法镀膜以及环境污染等诸多问题。磁控溅射镀膜技术作为一种新型镀膜工艺,其镀膜均匀致密且绿色无污染,能良好地应用于多轮廓型腔结构件中。论述了不同磁控溅射镀膜方法的特点,以及磁控溅射镀膜在复杂型腔结构件中的关键技术。The multi -contour cavity part has complex inner cavity. In the process of electroless coating, there are some problems such as poor adhesion between film base, uneven thickness of film, inner comer be coated and environmental pollu- tion. As a new coating process, magnetron sputtering coating technology can be used in multi - contour cavity structure. In this paper, the characteristics of different magnetron sputtering coating technology and the key techniques of magnetron sput- tering coating in complex cavity structure were discussed.

关 键 词：磁控溅射 复杂型腔 绿色环保 表面镀膜 关键技术 

分 类 号：TB43[一般工业技术]