硒离子束辅助沉积铜铟硒过程中表面能量沉积效应的仿真研究  

Energy deposition effect of Se ion beam assisted deposition of CuInSe_2 films

作　　者：卢文文 马小弟 武学涛 

机构地区：[1]庆阳市特种设备检验所,甘肃庆阳745000

出　　处：《真空》2018年第1期56-60,共5页Vacuum

摘　　要：借鉴热传导和分子动力学领域里的相关知识,对铜铟硒薄膜太阳能电池沉积过程中入射硒离子束在表面的能量沉积热效应进行了研究,建立了一维传热模型,在此基础上,给出一维热传导模型的计算方程组,并用ANSYS软件对一维热传导过程进行仿真模拟,给出沉积表面的温度分布。According to heat conduction and molecular dynamics, the energy deposition effect of ion beam on the surface in the process of CuInSe2 film deposition was studied, a one-dimensional heat conduction model was established. On this basis, the calculation equations of the one-dimensional heat conduction model were given, The one-dimensional heat conduction process was simulated by ANSYS software, and the temperature distribution of the deposited surface was calculated.

关 键 词：铜铟硒太阳能电池 离子束辅助沉积 热效应 仿真分析 

分 类 号：TB43[一般工业技术] O484[理学—固体物理]