硬质合金刀具类金刚石涂层及其性能评价  

Diamond-like Carbon Coatings on Cutting Edges of Cemented Carbide Tools and its Performance Evaluation

作　　者：周洋 张磊[1] 张锡健 Zhou Yang;Zhang Lei;Zhang Xijian(Key Laboratory of High Efficiency and Clean Mechanical Manufacture of Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan Shandong 250061, China;School of Microelectronics, Shandong University, Jinan Shandong 250061, China)

机构地区：[1]山东大学机械工程学院高效洁净机械制造教育部重点实验室,山东济南250061 [2]山东大学微电子学院,山东济南250061

出　　处：《硬质合金》2017年第6期384-392,共9页Cemented Carbides

基　　金：国家自然科学基金(51475276)

摘　　要：利用磁控溅射技术在硬质合金刀具表面制备了含纯金属过渡层的类金刚石涂层。采用光学轮廓仪、SEM、EDS、拉曼光谱、显微硬度计和多功能表面性能测试仪对制得的涂层进行了成分和性能等表征。结果表明,在类金刚石涂层和基体之间成功沉积了过渡层,过渡层对样品的性能影响程度不同。通过拉曼光谱分析表明过渡层的金属种类对样品涂层的sp^3键含量影响不大,过渡层元素为Cu和Ag的样品涂层中sp^3键含量略高。通过硬度测试表明涂层的硬度受到的影响也较小,其中过渡层元素为Ti和W的样品硬度较高。通过膜/基结合力测试表明过渡层的金属种类对该项性能影响较大,其中过渡层元素为W的样品表现最好。综合各项表征可以看出,过渡层更多地影响涂层与基体之间的关系,而对涂层本身的性能影响并不大。Diamond-like carbon coatings comprised of a pure metal interlayer were prepared on the surfaces of cemented carbide tools by magnetron sputtering techniques. The compositions and performances of the coatings obtained were characterized by optical profiler, SEM, EDS, Raman spectroscopy, micro-hardometer, and multifunctional surface performance tester. The results show that the interlayers, which have varied effects on the properties of the samples, are deposited between the cemented carbide substrates and diamond-like carbon coatings. It can be seen from the Raman spectrum that the metallic element of the interlayer has little effect on the content of the sp^3 bonds of the coating, and there are slightly more sp^3 bonds in the coatings, which comprise a Cu interlayer and an Ag interlayer. The hardness tests show that the type of metal also has little effect on the hardness of the coatings, and the samples deposited with Ti and W interlayers have a higher hardness. For the adhesion of the coatings to the cemented carbide substrates, the tests show that the metal type of the interlayer has a significant impact on this property, and the W-deposited samples exhibit superior performance. In conclusion, the metallic interlayers have notable effects on the adhesion between DLC coating and cemented carbide substrate, but they have little influence on the properties of the coating itself.

关 键 词：磁控溅射 类金刚石涂层 SEM和EDS 拉曼光谱 显微硬度 膜/基结合力 

分 类 号：TG174.4[金属学及工艺—金属表面处理]