高性能氮化铝差分谐振式加速度计的结构设计  

Structure design of high-performance aluminum nitride differential resonant accelerometer

作　　者：高杨[1,2] 韩超[3] 雷强[3] GAO Yang;HAN Chao;LEI Qiang(Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China;State Key Laboratory of Particle Detection and Electronics, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China;School of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, China)

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621999 [2]中国科学院高能物理研究所核探测与核电子学国家重点实验室,北京100049 [3]西南科技大学信息工程学院,四川绵阳621010

出　　处：《中国惯性技术学报》2018年第1期69-75,共7页Journal of Chinese Inertial Technology

基　　金：国家自然科学基金(61574131);中国工程物理研究院超精密加工技术重点实验室基金(2014ZA001);中国工程物理研究院电子工程研究所创新基金(S20141203);核探测与核电子学国家重点实验室开放课题基金(2016KF02);西南科技大学特殊环境机器人技术四川省重点实验室开放基金(14zxtk01);西南科技大学研究生创新基金(16ycx103)

摘　　要：提出了一种高性能氮化铝(Al N)差分谐振式加速度计结构。通过引入两级微杠杆来放大质量块的惯性力,提高灵敏度;采用"I"形支撑梁来降低横向灵敏度;利用差频检测方案降低温度共模误差的影响。该加速度计主要由质量块、支撑梁、双级微杠杆和谐振器组成,并通过理论分析和有限元仿真优化了它们的结构参数。模态分析表明两个谐振器的基频大约为373.3 k Hz,与干扰模态的频率差大约为9.4 k Hz,有效地实现了模态隔离。根据灵敏度的仿真结果,Al N差分谐振式加速度计的灵敏度64.6 Hz/g,线性度为0.787%,横向灵敏度为0.0033 Hz/g。热仿真的结果表明单个谐振器的温度灵敏度约为490 Hz/℃,加速度计输出差频的温度灵敏度为–0.83 Hz/℃,证明了差频检测方案可以降低温度共模误差的影响。上述所有仿真结果验证了该加速度计结构设计的可行性。A high-performance aluminum nitride（Al N） differential resonator accelerometer is proposed. The inertia of the mass is amplified to improve the sensitivity by two-stage microlever, the cross sensitivity is reduced by I-shaped supporting beam, and the differential frequency detection scheme is used to decrease the effect of temperature common mode error. This accelerometer is mainly composed of proof mass, supporting beam, two-stage microlever and resonator, and its structural parameters are optimized by theoretical analysis and finite element simulation. The modal analysis shows that the fundamental frequencies of the two resonators are approximately 373.3 k Hz, and their frequency differences from the interferential modes are about 9.4 k Hz, which effectively achieves the mode isolation. According to the simulation results of sensitivity, the sensitivity, linearity and cross sensitivity of Al N differential resonator accelerometer are 64.6 Hz/g, 0.787% and 0.0033 Hz/g, respectively. The simulation results of thermal stress show that the temperature sensitivity of the single resonator is about 490 Hz/℃, and the temperature sensitivity of the output differential frequency is –0.83 Hz/℃, which demonstrate that the differential frequency detection scheme can effectively reduce the influence of temperature common mode error. The simulation results verify the feasibility of the accelerometer structure design.

关 键 词：谐振式加速度计 氮化铝 微杠杆 支撑梁 差频检测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]