CrAlMoN梯度薄膜的微观结构及力学性能研究  

Study on Microstructure and Mechanical Properties of CrAlMoN Gradient Coatings

作　　者：巫少龙[1] 潘健 WU Shaolong1, PAN Jian2(1. Department of Mechanical Engineering, Quzhou College of Technology, Quzhou 324000, China; 2. College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310014, Chin)

机构地区：[1]衢州职业技术学院机电工程学院,浙江衢州324000 [2]浙江工业大学材料科学与工程学院,浙江杭州310014

出　　处：《铸造技术》2018年第4期914-916,共3页Foundry Technology

摘　　要：采用磁控溅射技术,在单晶Si片和M2工具钢表面沉积CrAlMoN梯度薄膜,利用SEM、EDS、XRD、划痕仪、纳米压痕仪研究了CrAlMoN梯度薄膜的微观结构、膜/基结合力、硬度和弹性模量。结果表明,CrAlMoN梯度薄膜呈面心立方结构,薄膜的表面和截面结构紧凑致密。梯度结构的CrAlMoN薄膜具有高的膜/基结合强度,薄膜硬度和弹性模量分别达到24.13GPa和342.33GPa。Cr Al Mo N coatings were deposited on silicon wafers and M2 tool steel substrates by magnetron sputtering technique. The microstructure, adhesive strength, hardness and young＇s modulus of coatings were investigated by SEM,EDS, XRD, Scratch test and nano-indentation. The results show that Cr Al Mo N coatings exhibit fcc structure. The surface and cross-section morphologies of Cr Al Mo N coatings are compact. The gradient structure of the Cr Al Mo N films has a high adhesive strength. The hardness and elastic modulus of the films reach 24.13 and 342.33 GPa, and the mechanical properties of the Cr Al Mo N coatings are better than Cr Al N coatings.

关 键 词：磁控溅射 CrAlMoN薄膜 微观结构 力学性能 

分 类 号：TG174[金属学及工艺—金属表面处理] TG113[金属学及工艺—金属学]