具有自标定功能的直线时栅位移传感器  

Linear Typed Time Grating Displacement Sensor with Self-calibration Function

作　　者：陈锡侯[1] 朱海 武亮[1] 田青青 Chen Xihou;Zhu Hai;Wu Liang;Tian Qingqing

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心

出　　处：《工具技术》2018年第4期128-132,共5页Tool Engineering

基　　金：国家自然科学基金(51605062;51675071);重庆市科技研发基地能力提升计划(CSTC2014PT-SY40002)

摘　　要：在极端特殊的环境下运用时栅位移传感器,过多的误差因素会导致其测量精度降低,如安装过程造成的偏移、电子元件参数偏差、外部影响介质的引入导致电磁场改变。在工业现场,常常没有使用高精度外部基准的条件,不能进行在线标定。为了解决上述问题,并在硬件上尽可能减少对标定系统的严格要求,本文提出了使用两个相隔一定间距(定距)的测量值函数,根据该函数解析出传感器的误差函数解析式,然后进一步求得其频谱式。根据该频谱式设计了一种具有自标定功能的直线式时栅位移传感器,其自标定原理是基于定距变换的误差频率扫描(频扫)。实验结果表明,在同样的条件下,该自标定方法所标定的精度与传统借助外部基准的标定方法的标定精度基本一致,两者与光栅对比误差为±2μm,自标定方法具有更高的效率以及更低的成本。Time grating displacement sensor is usually used in extreme severe environment,there exist the reduced measurement accuracy which caused by introducing too many error factors,such as the offset caused by the installation process,the deviation of electronic component parameters,the electromagnetic field changes caused by the introduction of the external influence medium. Moreover,it is impossible to perform on-line calibration on industrial sites without the use of high-precision external benchmarks. Aiming at solving this problem and reducing the strict requirement of the calibration system on the hardware as much as possible,a measurement function is proposed,which employs two separated intervals（fixed distance）. According to this function,the analytic expression of the error function of the sensor is derived,and then its spectrum is further obtained. Moreover,a linear time grating displacement sensor with self-calibration function is designed according to this spectrum,which self-calibration principle is based on error frequency scanning with fixed distance transform. The experimental results show that under the same conditions,the calibration accuracy of the self-calibration method is almost the same as that of the traditional calibration method using the external datum. There is only ± 2 error left between the two methods and the proposed self-calibration method has higher efficiency and lower calibration cost.

关 键 词：时栅位移传感器 频扫 自标定 

分 类 号：TG806[金属学及工艺—公差测量技术] TH741[机械工程—光学工程]