用于光谱控制的棱镜扩束装置精密装调特性分析  

Analysis on Precision Assembly Characteristics of Prism Expander Applied to Spectrum Control

作　　者：王倩[1,2,3] 赵江山 周翊[1,2] Wang Qian;Zhao Jiangshan;Zhou Yi(Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China;Beijing Excimer Laser Technology and Engineering Center, Beijing 100094, China;University of Chinese Academy of Sciences, Beijing 100094, China)

机构地区：[1]中国科学院光电研究院,北京100094 [2]北京市准分子激光工程技术研究中心,北京100094 [3]中国科学院大学,北京100094

出　　处：《中国激光》2018年第4期99-103,共5页Chinese Journal of Lasers

基　　金：国家科技重大专项(2013ZX02202)

摘　　要：线宽压窄模块是光刻用准分子激光器的重要组成部分。线宽压窄模块中棱镜组及光栅的装配角度直接影响系统输出特性。为了进一步改进准分子激光器线宽压窄模块工程化安装与调试工艺,研究了棱镜扩束器中棱镜角度偏差对系统线宽及能量的影响。通过理论推导及实验验证,分析了单个棱镜角度偏转对准分子激光系统线宽及能量的影响,确定了每个棱镜的装调误差;实验结果与理论分析结果基本符合。根据确定的装调误差优化设计线宽压窄模块的装调方法,对模块的光谱控制工程化具有一定的指导意义。Linewidth narrowing module is an important component of excimer laser for lithography.The installation angles of prisms and gratings affect the system output characteristics directly.In order to improve installation and debugging technique of linewidth narrowing module,we study the influence of the angle deviation of the prism in the prism expander on the energy and linewidth of the system.Through the theoretical derivation and experimental verification,we analyze the influence of individual prism angle deflection on the energy and linewidth of the excimer laser system,and determine the alignment error of each prism.The experimental results are in good agreement with the theoretical analysis results.The alignment method for optimizing the linewidth narrowing module design according to the alignment error has guiding significance for the spectrum control engineering.

关 键 词：激光器 准分子激光器 窄线宽 棱镜扩束器 装调误差 

分 类 号：TN248[电子电信—物理电子学]