表面等离子共振法测量纳米级金属薄膜厚度数值分析（英文）  

Simulation of Nano Metal Film Thickness Measurement Based on Surface Plasmon Resonance Effect

作　　者：刘庆纲[1] 解娴 秦自瑞[1] 郎垚璞 Liu Qinggang;Xie Xian;Qin Zirui;Lang Yaopu(State Key Laboratory of Precision Measuring Technology and Instruments （Tianjin University） , Tianjin 300072, Chin)

机构地区：[1]精密测试技术及仪器国家重点实验室(天津大学),天津300072

出　　处：《纳米技术与精密工程》2018年第1期16-22,共7页Nanotechnology and Precision Engineering

基　　金：supported by the National Natural Science Foundation of China (51575387);Tianjin Natural Science Foundation (14JCZDJC31100)~~

摘　　要：针对纳米级金属薄膜厚度测量的需求,建立了基于表面等离子共振(SPR)法膜厚测量的数学模型,并以K9棱镜-金膜-空气组成的Kretschmann结构为耦合装置,对SPR方法的光强、相位、波长、角度4种调制模式进行数值分析,介绍了这4种调制模式的原理,并对其传感器的测量范围、灵敏度等参数进行了分析.结果表明:光强型SPR装置的测量范围最大,相位型SPR装置的灵敏度最高.在实际金属薄膜厚度测量的应用中,除了传感器的测量范围和灵敏度外,还需考虑其后续处理装置、算法的复杂性及性价比,结合诸多因素选择合适的SPR传感器.In this paper, a mathematical model based on surface plasmon resonance （SPR） is presented to measure the nano metal film thickness with the coupling device of Kretschmann configuration composed of K9 prism-gold film-air. The principles of intensity, phase, wavelength and angle modulation modes are introduced and numerically analyzed. The measurement ranges and sensitivities of these four types of sen-sors are discussed. Results indicate that the SPR intensity detection method enjoys the widest measure-ment range and the SPR phase detection method shows the highest sensitivity. In practical application, not only the measurement range and sensitivity of sensor type, but the follow-up processing device, the complexity of the algorithm and cost-effective factors should be considered to select the appropriate SPR sensor to meet the thickness detection demands for the thin metal film.

关 键 词：SPR效应 金属薄膜 厚度 测量模型 数值分析 

分 类 号：O484[理学—固体物理] O539[理学—物理]