含过渡层TiAlN和CrAlN硬质膜的制备及其抗氧化性能研究  

The Preparation of TiAlN and CrAlN Hard Coatings with Interlayer and Its High Temperature Performance

作　　者：房海波 宋亮 尹雪 张罡[1] FANG Haibo;SONG Liang;YIN Xue;ZHANG Gang(Shenyang Ligong University, Shenyang 110159, China;LSC Technology（ Jiang Su）Co. , Yancheng 224200, China)

机构地区：[1]沈阳理工大学材料与工程学院,沈阳110159 [2]领胜城科技(江苏)有限公司,江苏盐城224200

出　　处：《沈阳理工大学学报》2018年第2期63-66,共4页Journal of Shenyang Ligong University

摘　　要：采用磁控溅射技术制备TiAlN、CrAlN及含Ti、Cr过渡层的TiAlN、CrAlN四种薄膜,并对其进行850℃大气热处理实验,通过激光共聚焦显微镜、纳米压痕仪对热处理后的试样进行测试。表征结果显示:热处理后的TiAlN薄膜及含有Ti过渡层的TiAlN薄膜硬度及弹性模量都大幅降低,前者比后者的表面粗糙度小、抗氧化性能更优;热处理后CrAlN薄膜的硬度和弹性模量大幅下降,而含Cr过渡层的CrAlN薄膜热处理后的硬度、模量相对较高,表面粗糙度也相对较小。TiAlN,CrAlN,TiAlN with Ti interlayer,CrAlN with Cr interlayer,these four kinds of films were prepared by magnetron sputtering. After heat treatment at 850℃ in air,the surface morphologies,nano-hardness and elastic modulus of the oxidized coatings were analyzed with Laser Scanning Confocal Microscope and nano-indentation,respectively.TiAlN films and TiAlN films with Ti interlayers showa significant decrease in hardness and modulus of elasticity. And the former has smaller surface roughness. The hardness and elastic modulus of CrAlN films are greatly reduced,while those properties of CrAlN films with Cr interlayer are good.

关 键 词：磁控溅射 TIALN CRALN 过渡层 

分 类 号：TG113.233[金属学及工艺—物理冶金]