垂直腔面发射半导体激光器的特性及其研究现状  

Characteristics and Progress of Vertical-Cavity Surface-Emitting Semiconductor Lasers

作　　者：李玉娇 宗楠[1] 彭钦军[1] Li Yujiao;Zong Nan;Peng Qinjun(Key Laboratory of Solid State Laser, Technical Institute of Physics and Chemistry Chinese Academy of Sciences, Beijing 100190, China;University of Chinese Academy of Sciences, Beijing 100049, China)

机构地区：[1]中国科学院理化技术研究所中国科学院固体激光重点实验室,北京100190 [2]中国科学院大学,北京100049

出　　处：《激光与光电子学进展》2018年第5期49-61,共13页Laser & Optoelectronics Progress

基　　金：国家自然科学基金青年基金(61505226)

摘　　要：与传统的边发射半导体激光器相比,垂直腔面发射激光器(VCSEL)具有光束质量好、阈值电流低、易于二维列阵集成和制造成本低廉等优点。近年来,以VCSEL为基础发展起来的电抽运和光抽运垂直外腔面发射激光器(VECSEL),在获得高的输出功率和光束质量的同时,可以通过在腔内插入光学元件,实现腔内倍频、波长可调谐和锁模等激光技术,在激光领域很有竞争力。本文介绍了面发射半导体激光器的结构、工作原理及性能优势,综述了其在高功率输出、可调谐技术、锁模技术等方面的研究现状与进展,探讨了该类型激光器的发展前景。Compared with the traditional edge emitting semiconductor lasers, the vertical cavity surface emitting laser （VCSEL） shows many advantages, such as good beam quality, low threshold current, easy fabrication in two- dimensional arrays and low cost. In recent years, the electrically pumped and optically pumped vertical external cavity surface emitting laser （VECSEL） developed on the basis of VCSEL is a very competitive light source in the laser field. It can realize intracavity frequency doubled, tunable wavelength and mode-locked lasers technology by inserting corresponding optical element within the cavity, and obtain high output power and beam quality. We introduce the structures, working principles and performance advantages of VCSEL and VECSEL. The research status and latest progress including high power, tunable operation, and mode-locking lasers are reviewed. The development prospect of VCSEL and VECSEL are discussed.

关 键 词：激光器 垂直腔面发射半导体激光器 电抽运 光抽运 高功率 可调谐技术 锁模技术 

分 类 号：TN248[电子电信—物理电子学]