MEMS环形谐振陀螺的结构设计与振动特性分析  

Structure design and vibration characteristics analysis of MEMS vibrating ring gyroscope

作　　者：寇志伟[1,2,3] 刘俊[1,2] 曹慧亮[1,2] 石云波[1,2] 张英杰[1,2] KOU Zhiwei;LIU Jun;CAO Huiliangl＇;SHI Yunbo;ZHANG Yingjie(Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, Taiyuan 03005 I, China;Inner Mongolia University of Technology, Hohhot 010051, China)

机构地区：[1]中北大学电子测试技术国防科技重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [3]内蒙古工业大学,呼和浩特010051

出　　处：《中国惯性技术学报》2018年第2期275-280,共6页Journal of Chinese Inertial Technology

基　　金：国家自然科学基金国家重大科研仪器研制项目(51727808);国家自然科学基金资助项目(51705477);山西省回国留学人员科研资助项目(2016-083);中北大学电子测试技术重点实验室开放基金(ZDSYSJ2015004)

摘　　要：针对环形谐振陀螺谐振结构特性参数相同、检测灵敏度高、温度与抗干扰特性好等特点,提出了一种新颖的S形挠曲支撑梁的电容式环形谐振陀螺。其环形谐振子的刚度系数、固有频率等振动特性参数是陀螺结构优化、模态控制、驱动与检测电路设计的主要理论参数。为了得到该陀螺精确的谐振子特性参数,基于角度敏感原理、谐振结构的材料力学性能与机械振动特性,推导了谐振结构的等效刚度系数与固有频率的理论模型,并且分别进行了有限元仿真分析与样机频率特性测试。结果表明该理论模型计算的固有频率与有限元分析的误差为7.0820%,与样机实际测试的误差为3.9035%,证明了理论模型的正确性,为该陀螺的进一步研究提供了理论依据。A novel capacitive vibrating ring gyroscope with S-shape flexure supporting springs is proposed in accordance with the characteristics of the ring vibration gyroscope, such as symmetrical resonant structure, high sensitivity, excellent temperature performance and anti-interference ability. The stiffness coefficient and natural frequency of ring resonator are necessary parameters for gyroscope structure optimization, mode control and circuit design. In order to calculate these resonator parameters, a theoretical model of the ring resonant structure＇s equivalent stiffness and natural frequency is derived according to the principle of angle sensitivity, material properties and mechanical vibration characteristics of the resonant structures. The finite element analysis simulation and the prototype frequency response test are carried out respectively, and the results show that the inherent frequency of the theoretical model is 7.0820% difference from that by the finite element analysis, and is 3.9035% difference from that of the actual test, which proves the correctness of the theoretical model and provides a theoretical basis for the further study of the gyroscope.

关 键 词：MEMS 环形谐振陀螺 结构设计 振动特性 固有频率 

分 类 号：U666.1[交通运输工程—船舶及航道工程]