高可靠性压差传感器的设计与测试  

Design and Test of High Reliable Differential Pressure Sensor

作　　者：陈玉玲[1] 史岩峰[1] 张艳华[1] 张巧寿[1] CHEN Yu-ling,SHI Yan-feng,ZHANG Yan-hua,ZHANG Qiao-shou(Beijing Institute of Structure and Environment Engineering,Beijing 100076,Chin)

机构地区：[1]北京强度环境研究所,北京100076

出　　处：《仪表技术与传感器》2018年第5期12-15,共4页Instrument Technique and Sensor

摘　　要：压差传感器用于伺服系统作动器两腔压力差的测量,文中针对高可靠性、高精度、耐高温、小型化压差传感器的应用需求,提出了高可靠性压差传感器的设计方案并进行测试,主要包括芯体设计、结构设计和电路设计。该产品采用SOI硅晶圆材料制作压力敏感芯片,可在150℃下正常工作。传感器通过性能测试以及环境试验,试验结果表明该传感器能够满足实际使用要求,在150℃下温度漂移和灵敏度漂移均小于±0.1%FS/℃。According to the measurement requirements of servo system with high accuracy,high reliability,high temperature resistance and miniaturization,a design method and test method of high reliable differential pressure sensor was introduced in this paper,mainly including the core design,structure design and circuit design.SOI Si crystal material was used for manufacturing Si pressure sensitive chip in this sensor,which can work at 150 ℃.Sensor passed through the performance test and evaluation of environmental test,the results show that the sensor can meet the practical requirements.Under 150 ℃,temperature drift and sensitivity drift are less than ±0.1% FS/℃.

关 键 词：高可靠性 压差传感器 SOI 环境试验 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]