ITO靶材坯体干燥技术探讨  

Study on Drying Technology of ITO Target Body

作　　者：柯尚文 周传水 张玲莉 余永强 李隽 Ke Shangwen;Zhou Chuanshui;Zhang Lingli;Yu Yongqiang;Li Jun(Guangdong Kaisheng Photovoltaic Technology Research Institute Co., Ltd. Foshan Guangdong 528100)

机构地区：[1]广东凯盛光伏技术研究院有限公司,广东佛山528100

出　　处：《中国玻璃》2018年第3期18-20,共3页China Glass

摘　　要：本文着重分析了ITO靶坯的各个干燥过程，以及干燥介质的温度、湿度、流量和流速还有使用的辅具对靶坯干燥的影响，并提出了提高干燥效率的方法。实验证明高湿高温的干燥介质条件有利于ITO靶坯的干燥质量和效率。This article focused on the analysis of the drying process of ITO target blanks, the influence of temperature, humidity, flow rate and flow rate of drying media, and the auxiliary tools used on the drying of target blanks, and proposed methods for improving the drying efficiency. Experiments have proved that high humidity and high temperature drying conditions were conducive to the drying quality and efficiency of ITO target blanks.

关 键 词：ITO靶材 干燥 相对湿度 

分 类 号：TS652[轻工技术与工程]