基于扫描电子显微镜的碳纳米管拾取操作方法研究  

Method of picking up carbon nanotubes inside scanning electron microscope

作　　者：杨权 马立[1] 杨斌[1] 丁汇洋 陈涛[2] 杨湛[2] 孙立宁[2] 福田敏男[3] Yang Quan;Ma Li;Yang Bin;Ding Hui-Yang;Chen Tao;Yang Zhan;Sun Li-Ning;Toshio Fukuda(School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China;Robotics and Microsystems Center, Soochow University, Suzhou 215021, China;Intelligent Robotics Institute, School of Mechatronic Engineering, Beijing Institute of Technology, Beijing 100081, China)

机构地区：[1]上海大学机电工程与自动化学院,上海200072 [2]苏州大学机器人与微系统中心,苏州215021 [3]北京理工大学机电工程学院智能机器人研究所,北京100081

出　　处：《物理学报》2018年第13期345-355,共11页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:61573238;61433010)资助的课题~~

摘　　要：碳纳米管场效应管是未来纳米器件的发展方向,而制造纳米器件的前提是拾取碳纳米管,基于扫描电子显微镜(SEM)的微纳机器人操作系统能够实现碳纳米管拾取操作.本文建立拾取操作中碳纳米管与原子力显微镜(AFM)探针间范德瓦耳斯力力学模型,不同接触状态下范德瓦耳斯力越大越有利于拾取碳纳米管.在SEM视觉反馈图像中建立相对坐标系,首先提出倾角变值方法检测碳纳米管与AFM探针的接触状态,然后运用动态差值方法识别碳纳米管与AFM探针空间位姿并校正碳纳米管位姿,最后自下而上拾取碳纳米管.实验结果表明:拟合直线倾角变值较大时碳纳米管与AFM探针发生接触,动态差值变化为零时碳纳米管与AFM探针为空间线接触,在完全线接触模型下选择合适的接触角度、接触长度和拾取速度能够成功拾取碳纳米管.In this paper a promising method of recognizing spatial contact state between carbon nanotubes（CNTs） and atomic force microscope（AFM） probe inside scanning electron microscope（SEM） is proposed. The CNTs can be picked up simply and effectively by van der Waals force without knowing depth information of SEM images by using this method.And a micro-nanorobotic manipulation system with 16 DOFs, which allows the automatic pick-up of CNTs based on visual feedback, is presented. The micro-nanorobotic manipulators are assembled into 4 units with 4 DOFs individually.Namely, a manipulator has 4 DOFs i.e., three linear motions and a rotational motion. Manipulators are actuated by picomotors with better than 30 nm linear resolution and less than 1 micro-rad rotary resolution. The van der Waals force mechanics model between CNTs and AFM probe in the picking up manuplation is established. In reality, the van der Waals force is the main attractive force under the vacuum condition inside SEM when the influence of staticelectricity is ignored. It is shown that the van der Waals force under horizontal（sphere-plane） contact model is significantly larger with appropriate overlapping length. Though the positions in both x and y directions of the CNTs and AFM cantilever are acquired, the relative positions of those two objects in the z direction remain unclear. In the gradually ascending process of AFM cantilever to contact the CNTs, the CNTs abruptly drop on the surface of AFM probe due to the van der Waals force. According to the relative coordinate system of SEM visual feedback images, the detection of contact state between carbon nanotubes and AFM probe are completed by using the inclination changing value of fitting line.The experimental results suggest that the abrupt contact between CNTs and AFM probe happens when the inclination changing value of the regression line is found to be 3.0263？. The spatial contact state between carbon nanotubes and AFM probe includes line contact（Model a） and point contact（Mo

关 键 词：碳纳米管 视觉反馈 接触检测 位姿识别 

分 类 号：TN16[电子电信—物理电子学]