大口径溶胶-凝胶光学膜层提拉制备工艺控制  

Control of Large Caliber Sol-Gel Optical Coating Preparation Technology

作　　者：王韬[1] 吕海兵[1] 严鸿维[1] 袁晓东[1] WANG Tao, LYU Haibing, YAN Hongwei, YUAN Xiaodong(Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 62190)

机构地区：[1]中国工程物理研究院激光聚变研究中心,绵阳621900

出　　处：《材料导报》2018年第A01期297-299,共3页Materials Reports

基　　金：国家自然科学基金(61405180)

摘　　要：大口径溶胶-凝胶化学膜的光学性能指标主要由膜层厚度和折射率决定,提拉法制备工艺的关键技术就是对这两个参数进行精确控制。通过优化胶体制备工艺,并利用椭圆偏振法测量化学膜膜厚及折射率变化情况,获得了提拉速度模型,并进行了实验验证,为大口径化学膜高性能指标提供了技术和工艺保证。The optical properties of large aperture sol-gel chemical coatings were mainly determined by the thickness and refractive index of the films.The key technique of the process was precisely controlling the two parameters.By optimizing the preparation process of the colloid and measuring the change of the thickness and refractive index of the chemical film by ellipsometry,we obtained the pulling speed model and verified it experimentally,which provided technical and technological guarantee for the high performance index of the large-diameter chemical coatings.

关 键 词：化学膜 膜厚 折射率 提拉镀膜 

分 类 号：O484.1[理学—固体物理]