四探针薄层电阻测试仪的电路原理  

Circuit principles of Four probe sheet resistance tester for Semiconductor diffusion layer

作　　者：李斌 LI Bin(Guangzhou Semiconductor Materials Researeh Institute , Guangzhou Guangdong 51061)

机构地区：[1]广州半导体材料研究所,广东广州510610

出　　处：《河南科技》2018年第14期45-47,共3页Henan Science and Technology

摘　　要：四探针薄层电阻测试仪具有量程选择方便、恒流源电流可调及数据读出迅速、稳定的特点。因此,本文结合半导体制程中扩散层薄层电阻测量的实际需要,介绍了四探针薄层电阻测试仪的测试原理和电路原理,以期为相关学者的研究提供参考。The four probe thin layer resistance tester has the characteristics of convenient range selection, adjustable current source current and fast and stable data reading. Therefore, this paper introduced the testing principle and cir- cuit principle of the four probe thin layer resistance tester with the practical needs of the thin layer resistance measurement of the diffusion layer in the semiconductor process, in order to provide reference for the research of the related scholars.

关 键 词：薄层电阻 扩散层 PN结 

分 类 号：TN407[电子电信—微电子学与固体电子学]