黏滑驱动式小型精密运动平台  

Small precision motion platform based on stick-slip driving principle

作　　者：时运来[1] 娄成树 张军[1] 程丁继 SHI Yun-lai, LOU Cheng-shu, ZHANG Jun, CHENG Ding-ji(State Key Laboratory of Mechanics and Control of Mechanical Structures,Nanjing University of Aeronautics ＆ Astronautics, Nanjing 210016, Chin)

机构地区：[1]南京航空航天大学机械结构力学及控制国家重点实验室,江苏南京210016

出　　处：《光学精密工程》2018年第5期1124-1132,共9页Optics and Precision Engineering

基　　金：南京航空航天大学研究生创新基地(实验室)开放基金资助项目(No.kfjj20160102);航空科学基金资助项目(No.2016ZA52014);江苏高校优势学科建设工程基金资助

摘　　要：为满足微纳操作系统对精密驱动技术的需求,本文提出了一种基于黏滑原理的小型精密运动平台。该平台将柔性铰链、惯性质量块以及弹性元件结合为独立的定子基座,并与压电叠堆、陶瓷球固连为定子,安装在平台基座底部,通过螺钉调节弹性元件端部垂直方向的位置,就可以改变定子与移动台间的预压力,进而获得最佳的驱动力。为研究黏滑驱动的运动机理,分析各参数对平台运动的影响,进行了力学建模;而摩擦力作为黏滑驱动的关键因素,为了能准确地表达黏滑驱动的摩擦机理,在力学建模中引入了LuGre摩擦模型,并利用Matlab/Simulink软件进行了仿真分析。设计加工的黏滑驱动平台的整体尺寸为40mm×40mm×18mm,质量为32g。试验表明:该平台最小可实现10nm的运动步长,速度最高可达2.5mm/s,行程为22mm。To realize precise actuation of micro/nano-manipulation systems,a type of nano-motion platform based on the stick-slip principle was designed.Flexure hinges,a mass block,and an elastic component were integrated as an independent stator base.The stator consisted of a stator base,a piezoelectric stack,and a ceramic ball installed in the base bottom.The vertical position of the end of the elastic component can be adjusted by rotating an adjustment screw to change the pre-pressure between the stator and moving platform.Thus,the optimal driving force can be obtained.Because of the motion mechanisms of stick-slip driving and the influence of various parameters on the platform motion,mechanical modeling was carried out.Friction force was of key significance for stick-slip driving.In order to accurately express the friction mechanism of stick-slip driving,the LuGre friction model was introduced into the mechanical modeling.The simulation analysis was performed using MATLAB/Simulink software.The overall size of the stick-slip driving platform is 40 mm×40 mm×18 mm,and its mass is 32 g.Experiments show that the platform can achieve a minimum step size of10 nm,its highest speed is 2.5 mm/s,and its stroke is 22 mm.

关 键 词：黏滑驱动 压电叠堆 平台 精密运动 力学分析 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]