蓝宝石活化Mo-Mn法金属化的机理研究  

Study on the Metallization Mechanism of Sapphire by Active Molybdenum-Manganese Method Technology

作　　者：陈欣 杨洁[1] 黄刚[1] 陈弹蛋 向军[1] 李天涛[1] 刘尔祥[1] CHEN Xin;YANG Jie;HUANG Gang;CHEN Dan-dan;XIANG Jun;LI Tian-tao;LIU Er-xiang(Institute of Fluid Physics,CAEP,Mianyang 621900,China)

机构地区：[1]中国工程物理研究院流体物理研究所,四川绵阳621900

出　　处：《真空电子技术》2018年第3期53-57,共5页Vacuum Electronics

摘　　要：本文采用活化Mo-Mn法对蓝宝石进行金属化,通过对蓝宝石、金属化层的显微结构及元素的分布情况来探索蓝宝石的活化Mo-Mn金属化机理。研究发现金属化配方对金属化效果影响很大,不合适的金属化配方及工艺参数容易导致金属化层表面析出玻璃,导致镀Ni困难。蓝宝石的金属化机理是蓝宝石中α-Al_2O_3溶解到金属化层中形成玻璃相并在降温的过程中析出部分α-Al_2O_3相,实现蓝宝石-金属化层的紧密结合;金属化层中Mo烧结和化学反应形成的玻璃相液相烧结,实现金属化层的致密化。In this research,active Mo-Mn method was used to metallize sapphire.The metallization mechanism was explored by analyzing the microstructure and element distribution of sapphire and metallized layer.The results show that the metallization formula has a great influence on metallization.Inappropriate metallization formula and process parameters can easily lead to glass precipitation on metallized layer surface,which leads to a difficulty of Ni plating.The metallization mechanism of sapphire is that theα-Al2O3 phase in sapphire is dissolved into metallized layer to form glass phase,and during the cooling process,part of theα-Al2O3 phase is precipitated to realize close bonding of the sapphire-metallized layer.In metallized layer,the Mo sintering and the chemical reaction formed liquid phase sintering of glass phase ensure the densification of the metallized layer.

关 键 词：蓝宝石 Mo-Mn法 金属化 

分 类 号：TB756[一般工业技术—真空技术]