MEMS低功耗催化甲烷传感器脉冲供电研究  

Research on pulse power supply of MEMS low power consumption catalytic methane sensor

作　　者：沈国杰[1] SHEN Guojie(City College of Science and Technology,Chongqing University,Chongqing 402167,China)

机构地区：[1]重庆大学城市科技学院,重庆402167

出　　处：《工矿自动化》2018年第7期27-31,共5页Journal Of Mine Automation

基　　金：重庆市本科高校"三特行动计划"特色专业建设项目(渝教高[2015]69号)

摘　　要：针对传统催化甲烷传感器功耗高的问题,在分析微型机电系统(MEMS)低功耗催化甲烷元件性能的基础上,提出脉冲供电工作方式。通过输出稳定性测试和灵敏度测试确定脉冲供电具体占空比,并对恒压供电和脉冲供电下元件的线性特性、零点温度特性、灵敏度特性、零点漂移及灵敏度漂移进行了测试。结果表明,脉冲供电工作方式不仅可极大地降低MEMS催化甲烷传感器的功耗,而且在零点漂移和灵敏度方面拥有更加优异的性能。In view of problem of high power consumption of traditional catalytic methane sensor,a pulsed power supply operation mode was proposed based on analysis of performance of MEMS low power consumption catalytic methane components.Specific duty ratio of pulse power supply was determined through output stability test and sensitivity test,and linearity,zero temperature characteristics,sensitivity characteristics,zero drift and sensitivity drift of the components under constant voltage supply and pulse power supply were tested.The results show that the pulse power supply operation mode can not only greatly reduce power consumption of MEMS catalytic methane sensor,but also has superior performance in zero drift and sensitivity.

关 键 词：甲烷传感器 微型机电系统 脉冲供电 载体催化 MEMS催化元件 低功耗 

分 类 号：TD712.55[矿业工程—矿井通风与安全]