椭偏法光学材料折射率测量精度分析  

Analysis of Refractive Index Measurement Accuracy of Optical Materials:Ellipsometry

作　　者：武月月 弥谦[1] WU Yueyue;MI Qian(School of Optoelectronic Engineering,Xi＇ an Technological University,Xi＇ an 710021,China)

机构地区：[1]西安工业大学光电工程学院,西安710021

出　　处：《西安工业大学学报》2018年第3期214-218,共5页Journal of Xi’an Technological University

基　　金：陕西省教育厅(204040007)

摘　　要：为了实现光学材料参数高精度测量与初步检测材料快速进行.基于对椭偏法测量光学材料折射率的原理,对实验仪器的选取和实验过程进行设计,得出实验数据,对实验中的光强强度变化误差、入射角精度、起偏器和检偏器转动误差等方面进行分析.结果表明:该实验在实验仪器选取和测角精度上改进,使折射率测量误差达到1×10^(-4),实现了光学参数的低成本,高精度检测.The paper presents a high precision method for measuring parameters of optical materials and a fast preliminary test of optical materials.Based on the principle of measuring the refractive index of optical materials by ellipsometry,the selection of the experimental apparatus and the experimentation are designed and then the experimental data are obtained.The paper analyzes the intensity change error,the precision of the incident angle,the rotation error of the polarizer and analyzer.The results show that the improvement in the selection of apparatus and the measurement accuracy has made the refractive error less than 1×10^-4.It is concluded that this is a low cost and high precision method for measuring optical parameters.

关 键 词：椭偏法 折射率 测量精度 光学材料 

分 类 号：O434[机械工程—光学工程]