非制冷热敏二极管型红外焦平面阵列电压温度系数的分析与优化（英文）  

Analysis and Optimization of the Voltage Temperature Coefficient of a Thermodiode Uncooled Infrared Focal Plane Array

作　　者：张强[1,2,3] 刘瑞文[1] 吕文龙 侯影[1,4] 魏德波 刘超[1,3] 薛惠琼 傅剑宇 王玮冰 Zhang Qiang;Liu Ruiwen;Lu Wenlong;Hou Ying;Wei Debo;Liu Chao;Xue Huiqiong;Fu Jianyu;Wang Weibing(Smart Sensing Research and Development Centre,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Research and Development Center for Internet of Things,Chinese Academy of Sciences,Wuxi 214028,China;University of Chinese Academy of Sciences,Beijing 100049,China;Kunshan Optical Microelectronics Co.Ltd.,Kunshan 215325,China)

机构地区：[1]中国科学院微电子研究所智能感知研究发展中心,北京100029 [2]中国科学院物联网研究发展中心,江苏无锡214028 [3]中国科学院大学,北京100049 [4]昆山光微电子有限公司,江苏昆山215325

出　　处：《微纳电子技术》2018年第9期617-624,共8页Micronanoelectronic Technology

基　　金：National Natural Science Foundation of China(61601455,61335008);National High-Tech R&D Program of China(863 Program)(2015AA042605);Leading Cooperation Team Between Chinese Academy of Science and Peking University(XMXX201200019933)

摘　　要：灵敏度是非制冷热敏二极管型红外焦平面阵列（IRFPA）的一项重要性能指标。二极管结构的电压温度系数（VTC）对灵敏度有很大的影响。分析了二极管结构的设计参数和工艺参数对其电压温度系数的影响,仿真结果表明二极管的串联个数和pn结结面积是两项重要因素。因此,设计出6个串联＂阱＂形pn结的二极管结构,并对具有该结构的热敏二极管型红外焦平面阵列进行了流片。测试结果表明,在10μA正向偏置电流下,二极管结构的电压温度系数为8.2 mV/K,单个像素的灵敏度为19.1μV/K。不同结面积结构的测试结果表明,增加结面积能有效提升二极管结构的电压温度系数和灵敏度。Sensitivity is an important performance index of the thermodiode uncooled infrared focal plane array（IRFPA）.The voltage temperature coefficient（VTC）of diode structures has a strong impact on the sensitivity.The influences of the design and process parameters on the VTC of the diode structure were analyzed.The simulation result shows that the number of series diodes and pn junction area are two key factors influencing the VTC.Therefore,the diode structure with six series ＂ well＂ shape pn junctions was designed.The thermodiode IRFPA with this structure was fabricated.The test results show that under the forward bias current of 10μA,the VTC of the diode structure is 8.2 mV/K,and the sensitivity of a single pixel is 19.1μV/K.And the test results of structures with different junction areas show that increasing the junction area can effectively enhance the VTC and sensitivity of the diode structure.

关 键 词：电压温度系数(VTC) PN结二极管 红外焦平面阵列(IRFPA) 灵敏度 微电子机械系统(MEMS) 

分 类 号：TN215[电子电信—物理电子学]