基于AlN的MEMS变形镜仿真及驱动性能研究  

Simulation and Driving Performance of AlN-Based MEMS Deformable Mirror

作　　者：邵健 李琦 余洪斌 Shao Jian;Li Qi;Yu Hongbin(School of Optical and Electrical Information,Huazhong University of Science and Technology Wuhan.Hubei 2 Shenzhen Research Institute of Huazhong University 430074,China;of Science and Technology,Shenzhen 518000,Chin)

机构地区：[1]华中科技大学光学与电子信息学院,湖北武汉430074 [2]深圳华中科技大学研究院,深圳518000

出　　处：《激光与光电子学进展》2018年第8期413-420,共8页Laser & Optoelectronics Progress

基　　金：中央高校基本科研业务费专项资金(2016JCTD112);深圳市基础研究计划(JCYJ20160414102014801)

摘　　要：设计了一种基于氮化铝(AlN)材料的压电连续面型变形镜,采用理论分析和COMSOL仿真对该AlN MEMS变形镜的结构进行了优化,拟合了前14项Zernike多项式,对其驱动性能特别是像差矫正能力进行了系统研究。研究结果表明,该变形镜表现出与COMSOL工艺相兼容、制备工艺简单且环保的特点,具有线性控制、大形变量的优势,满足一般自适应光学系统的要求。An AlN-based piezoelectric continuous membrane deformable mirror is designed.Based on the theoretical analysis and COMSOL simulation,the structure of AlN MEMS deformable mirror is optimized and the first 14-term Zernike polynomials are fitted.Its driving performances,especially its aberration correction ability,are investigated systematically.The research results show that such a deformable mirror has the advantages of excellent linear control and large deformation.It is compatible with the COMSOL process,and its processing technique is simple and environmentally friendly,which meets the general requirements of self-adaptive optical system.

关 键 词：光学设计 自适应光学 变形镜 氮化铝(AlN) 驱动性能 ZERNIKE多项式 微电子机械系统(MEMS) 

分 类 号：TH744[机械工程—光学工程]