乙硼烷制备和纯化方法的探讨  

The Preparation and Purification of Borane

作　　者：禹金龙 傅铸红 陈艳珊 YU Jinlong;FU Zhuhong;CHEN Yanshan(Guangdong Huate Gas Co.,L td.,Foshan 528241,China)

机构地区：[1]广东华特气体股份有限公司,广东佛山528241

出　　处：《低温与特气》2018年第4期22-26,共5页Low Temperature and Specialty Gases

摘　　要：乙硼烷作为最简单的硼氢化合物、典型的"缺电子"化合物,主要用作P-型半导体芯片生产中的掺杂剂。简述乙硼烷的理化性质,并介绍乙硼烷产品的制备方法和纯化方法。borane is a typical＂electron deficient＂compound. It is mainly used as a dopant in the production of P-semiconductor chip. This paper introduced the properties of borane,and the preparation and purification methods of borane are briefly described.

关 键 词：乙硼烷 制备 纯化 

分 类 号：TQ117[化学工程—无机化工]