扫描电镜和电子探针对比测试碲在镍合金中的分布  

The comparison between SEM and EPMA in analysis of tellurium penetration into nickel alloy

作　　者：赵同新 ZHAO Tong-xin(Analysis Center,SHIMADZU（China）Co.,Ltd.,Shanghai 200233,China)

机构地区：[1]岛津企业管理(中国)有限公司分析中心

出　　处：《物理测试》2018年第4期21-24,共4页Physics Examination and Testing

摘　　要：在镍合金表面电镀碲薄膜,在不同温度下对样品进行不同时间的真空热处理,以研究碲元素在镍基合金中的扩散分布情况。使用扫描电镜（SEM）配置能谱仪（EDS）和电子探针（EPMA）分别测试某一热处理工艺条件的试验试样,印证了EPMA在元素较低含量方面测试的独特优势。最后从多方面总结对比了SEM配置EDS和波谱仪（WDS）附件与EPMA的不同特点,说明在微区观察方面,SEM具有较突出的优势,而在微区分析方面,EPMA具有不可替代的特点。The tellurium film was electroplated on the surface of nickel based alloy,and then the samples were treated at different temperatures for different time in vacuum heat treatment condition. The penetration distribution of tellurium in Ni based alloy was investigated. SEM deployed with EDS and EPMA were used to test the experimental sample of a certain heat treatment condition,which confirmed the unique advantages of EPMA in element with low content test. Finally,the different characteristics of SEM deployed with EDS and WDS accessories and EPMA were summarized from various aspects,and it was concluded that SEM had more prominent advantages in micro area observation,and EPMA had irreplaceable features in micro area analysis.

关 键 词：镍基合金 扩散分布 电子探针 扫描电镜 能谱仪 波谱仪 

分 类 号：TG156.95[金属学及工艺—热处理] TG174.4[金属学及工艺—金属学]