非蒸散型吸气剂的研究进展  

Latest Development of Non-evaporable Getter Materials

作　　者：颜攀 韩兴博 冷海燕[1,2] 刘卫[1,2] Yan Pan;Han Xingbo;Leng Haiyan;Liu Wei(Shanghai University,Shanghai 200444,China;Shanghai Institute of Applied Physics,Chinese Academy of Sciences,Shanghai 201800,China)

机构地区：[1]上海大学,上海200444 [2]中国科学院上海应用物理研究所,上海201800

出　　处：《真空科学与技术学报》2018年第8期650-656,共7页Chinese Journal of Vacuum Science and Technology

基　　金：上海市科学技术委员会科研项目(16ZR1443500);国家自然科学基金项目(51401119)

摘　　要：首先从Zr基非蒸散型吸气剂和Ti基非蒸散型吸气剂这两大分类介绍了非蒸散型吸气剂的发展历程,并比较了Zr、Ti基非蒸散型吸气剂的优缺点,然后从制备与改性方法两个方面,对非蒸散型吸气剂的研究现状进行系统性的介绍,并对非蒸散型吸气剂未来的研究方向进行了展望。研究发现,Zr、Ti基非蒸散型吸气剂的特性导致两者在主要的应用领域有所不同,两者的改性研究方向也有所不同。Zr基非蒸散型吸气剂未来的研究方向应集中在多种改性相结合的方法来扩展锆钒铁合金的应用领域和探索新型锆钒铁合金,Ti基非蒸散型吸气剂未来的研究重点应集中在改进其成膜工艺,或者探究新型的成膜法以代替传统的成膜法。值得注意的是降低Zr、Ti非蒸散型吸气剂的平台压没有引起足够的重视。The latest advance in non-evaporable getter materials,comprising Zr-based and Ti-based non-evaporable getter materials,was tentatively reviewed. The discussions with specific examples centered on： i） the main technical strengths and weaknesses of the Zr-based and Ti-based getters; ii） their preparation and modification techniques,including but not limited to the fabrication of nano-structured getters,thin film growth methods such as magnetron sputtering,chemical vapor deposition and spraying coating,electroplating/arc ion plating,synthesis of a variety of getter alloys; and iii） the applications of the modified Zr-based and Ti-based getters. In addition,the development trends,existing technical problems and possible solutions of Zr-based and Ti-based getter materials were also briefly discussed,respectively,in a thought provoking way. However,the adsorption behavior of the Zr-based and Ti-based getters in high vacuum and/or ultra-high vacuum remains to be investigated.

关 键 词：合金 非蒸散型吸气剂 激活温度 吸气剂性能 

分 类 号：TN104.8[电子电信—物理电子学]