二维光栅制备及衍射特性研究  

Research on Fabricating of Two Dimensional Grating and Diffraction Characteristic

作　　者：尤玉军 刘佐濂[1] 李冠霖 练诚 李明谦 张成云[1] YOU Yu-jun;LIU Zuo-lian;LI Guan-lin;LIAN Chen;LI Ming-qian;ZHANG Cheng-yun(Guangzhou University,Guangdong Guangzhou 510006)

机构地区：[1]广州大学,广东广州510006

出　　处：《大学物理实验》2018年第4期26-30,共5页Physical Experiment of College

基　　金：广东省自然科学基金项目(2015A030310832);2016年度大学生创新训练项目(省级);广州市科技计划项目(201607010261)

摘　　要：利用飞秒激光微加工平台,结合激光直写技术,在50 nm厚的金膜上制备出了二维光栅,研究了扫描速度和扫描间距固定时,飞秒激光能量密度的改变对二维光栅结构的影响。通过扫描电子显微镜(Scanning Electron Microscopy,SEM)对制备的二维光栅的形貌进行表征,并准确测量了光栅参数。利用氦氖激光分析了二维光栅的衍射效果,并与数值模拟得到的图案进行比较,分析了条纹缝宽和栅格尺寸对衍射点阵列光强分布的影响。研究表明飞秒激光直写技术可以方便快速地通过加工参数的改变制备不同尺寸分布的二维光栅。Using laser direct writing technique,two-dimensional（2D）grating on the gold film of 50 nm thickness is fabricated based on the femtosecond（fs）laser micro-processing platform.The effect of fs laser fluence on the structure of 2D grating is studied with a fixing scanning speed and scanning interval.The surface morphology of 2D grating is characterized and the constant of grating is accurately measured by SEM.The diffraction pattern of the 2D grating is analyzed by using He-Ne laser and compared with the pattern obtained by numerical simulation.The effect of fringe spacing and grid size on intense distribution of dot array diffracted is studied.The results show that 2D grating with different sizes,whose constant changes with the different processing parameters,can easily be fabricated by utilizing the femtosecond laser direct writing technique.

关 键 词：微纳加工 飞秒激光 光栅衍射 

分 类 号：TN249[电子电信—物理电子学]