强震观测用MEMS型加速度计研究  

Study on MEMS accelerometer for strong motion observation

作　　者：孙志远[1] 王雷[1] SUN Zhiyuan;WANG Lei(Institute of Engineering Mechanics,China Earthquake Administratio;Key Laboratory of Earthquake Engineering and Engineering Vibration of China Earthquake Administration,Harbin 150080,China)

机构地区：[1]中国地震局工程力学研究所中国地震局地震工程与工程振动重点实验室,黑龙江哈尔滨150080

出　　处：《世界地震工程》2018年第3期124-128,共5页World Earthquake Engineering

基　　金：中国地震局工程力学研究所基本科研业务费专项资助项目(2017B15)

摘　　要：强震观测中记录的加速度时程是城市大型建筑抗震设计的重要依据,为城市抗震设防提供可靠的数据支持。因此,对加速度计在稳定性、线性度、动态范围和直流响应等性能方面有着很高的要求。提出利用静电力反馈控制技术与传感器技术相结合形成闭环力平衡式MEMS加速度计,使之具有良好的低频特性。并采用四阶ΣΔ调制器完成低噪声信号采样,确保其动态范围高于140 d B,完全满足现有强震观测规范对该项指标的要求。Acceleration time histories recordedin strong motion observation is an important basis data for seismic de- sign of large buildings in cities, and can provide reliable data support for seismic fortification of cities. Therefore, the accelerometer has high requirements in terms of stability, linearity, dynamic range and DC response. In this paper,an MEMS accelerometer with closed-loop force balance was developed by combining electrostatic force feed- back control technology and sensor technology, so that ithas good low-frequency characteristics. The fourth-order ∑△ modulator is used to sample the low-noise signal to ensure that the dynamic range ofthe accelerometeris higher than 140dB, which fully meets the requirements of the existing strong motion observation standard.

关 键 词：强震观测 MEMS加速度计 闭环 力平衡 ∑△调制器 

分 类 号：P315.9[天文地球—地震学]