Cu/Ti纳米薄膜表面形貌的分形表征研究  

Research on Fractal Characterization of the Surface Morphology of Cu/Ti Nano Thin Film

作　　者：林启敬[1,2,3,4] 吴昊 张福政 王琛英 蒋庄德[1,2] LIN Qi-jing;WU Hao;ZHANG Fu-zheng;WANG Chen-ying;JIANG Zhuang-de(Collaborative Innovation Center of High-End Manufacturing Equipment,Xi＇an Jiaotong University,Xi＇an,Shaanxi 710054,China;State Key Laboratory of Mechanical Manufacturing Systems Engineering,Xi＇an Jiaotong University,Xi＇an,Shaanxi 710049,China;State Key Laboratory of Digital Manufacturing Equipment ＆ Technology,Huazbong University of Science and Technology,Wuhan,Hubei 430074,China;State Key Laboratory of Fluid Power and Meehatronie Systems,Zhejiang University,Hangzhou,Zhejiang 310027,China)

机构地区：[1]西安交通大学高端制造装备协同创新中心,陕西西安710054 [2]西安交通大学机械制造系统工程国家重点实验室,陕西西安710049 [3]华中科技大学数字制造装备与技术国家重点实验室,湖北武汉430074 [4]浙江大学流体动力与机电系统国家重点实验室,浙江杭州310027

出　　处：《计量学报》2018年第5期593-597,共5页Acta Metrologica Sinica

基　　金：国家自然科学基金(51608437;51505368);973项目(2015CB057402);中国博士后基金(2017M613114);陕西省博士后基金(2017BSHEDZZ69);西安通大学基本科研业务费(xjj2016011);数字制造装备与技术国家重点实验室(华中科技大学)开放课题(DMETKF2016006);流体动力与机电系统国家重点实验室(浙江大学)开放基金(GZKF-201617)

摘　　要：采用磁控溅射法制备了不同组分和厚度的Cu/Ti薄膜,采用原子力显微镜(AFM)测量了其表面形貌,利用功率谱法对AFM高度图像进行了分形表征。结果表明:Cu/Ti薄膜表面形貌具有多尺度行为,表面演化在全域和局域呈现出不同的标度行为;AFM图像功率谱的高频段直接体现了薄膜表面的细节信息,而低频段体现了薄膜表面背景区域的复杂程度;低频分形维数与粗糙度之间有着必然的联系,能够反应粗糙值Ra的变化趋势。Different composition and thickness of Cu/Ti films are fabricated by magnetron sputtering technology and their surface morphology are measured using atomic force microscope （ AFM ）. The method of power spectrum is used to characterize the fractal morphology of the AFM height images. The results show that the Cu/Ti film surface morphology has multi-scale behavior and surface evolution in the whole and local area presents different scaling behavior. The high frequency section of the power spectrum for AFM image directly reflects the detail information of the surface while low frequency section reflects the complexity of the background region. There is an inevitable correlation between low frequency fraetal dimension and roughness, because the change of low frequency fractal dimension can reflect the change trend of rough value Ra.

关 键 词：计量学 纳米薄膜 分形表征 表面形貌 功率谱 

分 类 号：TB921[一般工业技术—计量学]