基于霍耳效应测量半导体衬底优劣浅谈如何使用检测技术助力科学实验  

Study on Judging the Performance of Semiconductor Substrate Based on Hall Effect Talking about How to Correctly Use Testing Technology in Scientific Experiments

作　　者：陈大柱[1] 刘新科[1] Chen Dazhu;Liu Xinke(College of Materials Science and Engineering,Shenzhen Univeristy,Shenzhen 518060,China)

机构地区：[1]深圳大学材料学院,广东深圳518060

出　　处：《广东化工》2018年第17期195-196,191,共3页Guangdong Chemical Industry

基　　金：国家自然科学基金青年项目(61504083);广东省省级科技计划项目(2015A010103016);<环境材料>课堂教学模式创新研究与实践

摘　　要：利用霍耳效应研究半导休材料的电阻率,载流子浓度和迁移率是霍耳的主要技术之一。文章简单介绍了霍耳效应和HL5500霍耳测量系统;分析了几组实验样品,讨论了样品性能反转可能是受到掺杂的缘故。探讨在科学实验中应该做到多批次实验与科学记录相结合的方式,以期在实验中能尽快发现实验存在的问题,调动实验热性,培养创新能力,提高专业素养,为国家的研究型和应用技术型人才培养目标做出积极贡献。Using Hall effect to study the electrical resistivity, carrier concentration and mobility of semiconductor materials is one of Hall＇s main technologies. The article briefly introduces the Hall effect and the HL5500 Hall-effect measurement system. Several sets of experimental samples are analyzed, and it is discussed that the sample performance reversal may be doped. This paper discusses how to combine multi-batch experiments with scientific records in scientific experiments so as to find out the problems existing in the experiment as soon as possible in the experiment, mobilize the experimental heat, cultivate the innovative ability and improve the professional qualities, And the application of technical personnel training objectives to make a positive contribution.

关 键 词：霍耳效应 HL5500 反型掺杂 教学改革 实验教学 

分 类 号：TQ[化学工程]