基于力反馈的笔式自动化直写系统研究  

Research on pen-based automatic direct writing system based on force feedback

作　　者：罗昆 冷惠文[1] 杨兴[2] 邢玉琪 代建军 LUO Kun;LENG Huiwen;YANG Xing;XING Yuqi;DAI Jianjun(School of Eleetromeehanical and Automotive Engineering,Yantai University,Yantai Shandong 264005,China;The State Key Laboratory of Precision Measurement Technology and Instrumentation,Tsinghua University,Beiiing 100084.China)

机构地区：[1]烟台大学机电汽车工程学院,山东烟台264005 [2]清华大学,精密测试技术及仪器国家重点实验室,北京100084

出　　处：《激光杂志》2018年第9期51-54,共4页Laser Journal

基　　金：国家自然科学基金项目(No.61671271);国家自然科学基金项目(No.51705283);北京市自然科学基金(No.17L20152)

摘　　要：研究并设计了一种基于力反馈的笔式自动直写系统，系统主要部分包括精密三轴线性位移台、高分辨率微力传感器及信号调理电路、数据采集卡。通过接触力检测与反馈，由LABVIEW编程控制，使位移台实现任意设定路径的运动，从而实现任意图案的直写。系统可实现微牛级接触力检测、纳米级位移增量控制以及0．05mrn／s至2．3mm／s速度范围内可调等，为笔式直写技术在微／纳米器件制造领域的应用提供了重要的技术支持。应用毛笔在纸质基底实现直写，从而对系统的各项性能进行了实践性的验证。Research and design a pen-based automatic direct writing system based on force feedback. The main parts of the system include precision three-axis linear stage, high-resolution load cell, signal conditioning circuit ,data acquisition card. Through the detection and feedback of the contact force, it is programmed by LABVIEW to enable the stage to realize the movement of any set path, thus enabling direct writing of arbitrary patterns. The system can re- alize the micro force detection, the nanoscale displacement incremental control and the adjustable speed range of 0.05 -2.3mm/s, etc. It provides important technical support for the application of pen direct writing technology in micro nano devices manufacturing. The successful application of the brush achieves direct writing on the paper substrate, verifies the performance of the system practically.

关 键 词：力反馈 笔式直写 笔式直写系统 微/纳米器件 

分 类 号：TN271[电子电信—物理电子学]