压电基片上微液滴沿球形表面输运特性研究  

Study on Transporting Characteristics of Micro-droplets Along Spherical Surface on Piezoelectric Substrate

作　　者：章安良 董良威[2] 刘尉悦[3] ZHANG Anliang;DONG Liangwei;LIU Weiyue(Department of Microelectrics,Wuyi University,Wuyishan 354300,China;Department of Electronic Engineering,Changzhou Institute of Technology,Changzhou 213022,China;Institute of Micro and Nano Electronic System,Ningbo University,Ningbo 315211,China)

机构地区：[1]武夷学院微电子系,福建武夷山354300 [2]常州工学院电子系,江苏常州213022 [3]宁波大学微纳电子系统研究所,浙江宁波315211

出　　处：《压电与声光》2018年第5期646-649,共4页Piezoelectrics & Acoustooptics

基　　金：江苏省高校自然科学研究基金资助项目(17KJB510004)

摘　　要：研究了声表面波驱动压电基片上微液滴沿球形表面输运特性。球珠底部采用聚二甲基硅氧烷点粘在128°YX-LiNbO3压电基片上,并放在恒温箱中固化。压电基片上微液滴在声表面波驱动力和球珠阻力的共同作用下沿球珠表面输运。为便于观察,采用红墨水溶液为实验对象,对球形表面微液滴声表面波作用下输运特性进行了研究。结果表明,微液滴在球形表面上输运特性取决于激发声表面波的电信号功率、球珠直径和微液滴体积。3μL微液滴在28.7dBm电信号功率下,可以输运到直径2mm的球珠顶端。The transporting characteristics of micro-droplets along the spherical surface driven by surface acoustic wave were investigated.The bottom of the steel ball was adhered to the 128°YX-LiNbO3 piezoelectric substrate by polydimethylsiloxane,and is cured in an incubator.The micro-droplets on the piezoelectric substrate were transported along the surface of the ball under the combined action of the surface acoustic wave driving force and the ball resistance.For convenience of observation,the transporting characteristics of micro-droplets on spherical surface under surface acoustic waves were studied using the red ink aqueous solution as experimental object.The results showed that the transport properties of micro-droplets on spherical surfaces were determined by the electrical signal power which excited the surface acoustic wave,the diameter of the spherical ball and the volume of the micro-droplets.The micro-droplets of 3μL can be transported to the top of the steel ball with a diameter of2 mm at the electrical signal power of 28.7 dBm.

关 键 词：声表面波 输运特性 液滴 叉指换能器 显色反应 

分 类 号：TN371[电子电信—物理电子学]