压电微泵驱动信号及流量影响因素分析  

Analysis of Driving Form and Influence Factors of Piezoelectric Micropump

作　　者：杨晨明 许红[1] 姚武昊 吴大鸣[1] 张亚军[1] 代伊豪 YANG Chenming;XU Hong;YAO Wuhao;WU Daming;ZHANG Yajun;DAI Yihao(College of Mechanical and Electrical Engineering,Beijing University of Chemical Technology,Beijing 100029,China)

机构地区：[1]北京化工大学机电学院,北京100029

出　　处：《压电与声光》2018年第5期736-741,共6页Piezoelectrics & Acoustooptics

摘　　要：压电微泵的泵出流量由微泵结构、压电振子特性及驱动系统驱动信号的形式决定。在机械结构及材料特性确定的条件下,压电振子的驱动信号决定着微泵输出微流量的可靠性和稳定性。在分析压电微泵驱动基理的基础上,通过Ansys对驱动压电振子有效振动的一、二阶频率进行有限元模拟分析,确定了驱动信号电压幅值、频率对微泵流量的影响。以此为基础搭建压电微泵流量测试实验平台,在相同电压和频率条件下,研究了3种不同脉冲信号(正弦波、三角波、矩形波)对输出流量的影响。通过实验对理论模型进行修正,得到了压电微泵输出流量简化模型。实验验证了所得模型在正弦波、三角波、矩形波3种不同波形驱动下最大误差不超过4%,控制范围内可靠性在99.0%以上。综合比较可知,方波脉冲信号为压电微泵最佳驱动信号。The piezoelectric micropump flow is determined by the structure of micro-pump,the characteristics of the piezoelectric vibrator and the form of the driving signals of the driving system.Under certain mechanical structure and material properties,the driving signal of piezoelectric vibrator determines the reliability and stability of the micropump flow.Based on the analysis of the driven principle of piezoelectric micropump,the effects of the voltage amplitude and frequency of the driving signals on the micropump flow has been determined via the finite element simulation analysis of the first-order and second-order frequencies which drive the piezoelectric vibrator to vibrate effectively.On this basis,an experimental platform for piezoelectric micropump flow test has been set up,and the effects of three different pulse signals（sine wave,triangle wave and rectangular wave）on the output flow have been investigated.Through experimental modification of the theoretical model,a simplified model for output flow of piezoelectric micropump is established.The experimental verification shows that the maximum error and reliability in the control range of the established model are less than 4%and over 99.0%respectively driven by the three waveforms of sine wave,triangle wave and rectangular wave.According to the comprehensive comparison,the square wave pulse signal is the optimal driving signal for the piezoelectric micropump.

关 键 词：微通道 压电微泵 计算机模拟 脉冲驱动信号 模型简化 

分 类 号：TM282[一般工业技术—材料科学与工程] TH323[电气工程—电工理论与新技术]