镁合金表面磁控溅射-微弧氧化制备Al2O3膜层的组织结构及性能  

Microstructure and properties of Al2O3 coatings prepared by magnetron sputtering and micro-arc oxidation on magnesium alloy surface

作　　者：王晓波[1] 全风美[1] 朱生发[1] 丁晶晶 史鹏[1] WANG Xiao-bo, QUAN Feng-mei, ZHU Sheng-fa, DING Jing-jing, SHI Peng(China Academy of Engineering Physics, Institute of Materials, Mianyang 621900, China)

机构地区：[1]中国工程物理研究院材料研究所

出　　处：《材料热处理学报》2018年第9期99-104,共6页Transactions of Materials and Heat Treatment

摘　　要：采用磁控溅射-微弧氧化的方法在镁合金表面制备了Al2O3膜层,随后采用X射线衍射分析（XRD）、扫描电镜（SEM）、能谱分析（EDX）等方法对微弧氧化膜层的相结构、截面形貌及膜层中的元素分布进行了分析,采用摩擦磨损和电化学腐蚀方法对膜层的耐磨耐腐蚀特性进行了测试。结果表明,通过先进行磁控溅射后进行微弧氧化的方式可以在镁合金表面获得Al2O3微弧氧化膜层。通过改变反应终止电压可控制微弧氧化膜层的厚度。当反应终止电压不高于510 V,膜层主要由铝和Al2O3组成。而当微弧氧化反应终止电压超过600 V后,铝膜层完全参与反应转变为微弧氧化膜层,膜层主要由Al2O3和MgO组成。Al2O3微弧氧化膜层的形成有助于提高镁合金表面的耐磨耐腐蚀性能。Al2O3 coatings were prepared on magnesium alloy surface by magnetron sputtering and micro-arc oxidation（ MAO）,and phase structure,cross-section morphology and elements distribution of the micro-arc oxidation（ MAO） coatings were studied by means of X-ray diffraction（ XRD）,scanning electron microscopy（ SEM） and energy dispersive spectrum（ EDX） analysis,the wear resistance and corrosion resistance were tested by means of friction wear experiment and electrochemical corrosion test. The results show that Al2O3 micro-arc oxide coatings can be obtained on the magnesium alloy surface by magnetron sputtering and then micro-arc oxidation. The thickness of micro-arc oxidation coatings can be controlled by changing the reaction terminate voltage. When the reaction terminate voltage is not higher than 510 V,the coating is mainly composed of Al and Al2O3. When the reaction terminate voltage of the micro-arc oxidation exceeds 600 V,the aluminum coating completely participates in the reaction and changes into the micro-arc oxide film,which is mainly composed of Al2O3 and MgO. The formation of the Al2O3 micro-arc oxidation coating is helpful to improve the wear and corrosion resistance of the magnesium alloy surface.

关 键 词：镁合金 磁控溅射 微弧氧化 组织结构 性能 

分 类 号：TG174.44[金属学及工艺—金属表面处理]