皮秒激光加工研究进展与展望  

Research progress and development of picosecond laser processing

作　　者：李平雪[1] 辛承聪 高健 张天松 肖坤[1] 董雪岩 李舜 王婷婷 苏宁[1] LI Ping-xue;XIN Cheng-cong;GAO Jian;ZHANG Tian-song;XIAO Kun;DONG Xue-yan;LI Shun;WANG Ting-ting;SU Ning(Institute of Laser Engineering,Beijing University of Technology,Beijing 100124,China)

机构地区：[1]北京工业大学激光工程研究院,北京100124

出　　处：《激光与红外》2018年第10期1195-1203,共9页Laser & Infrared

基　　金：国家自然科学基金项目(No.61675009)资助

摘　　要：皮秒激光加工作为一种先进的超快加工技术,以其"冷加工"、高重复频率和高脉冲能量等特点,可实现对多种材料高精度、高效率的微细加工,在精密机械、表面工程、生物医学等领域具有广阔的应用范围和前景。综述了皮秒激光用于金属薄板及硬脆性材料的微孔加工、切割划线以及用于钛酸锶、氧化锆等材料表面改性方面的研究进展,从工艺参数优化、配套装备改进等方面探讨了皮秒激光加工现阶段存在的问题及发展方向。As an advanced processing technique, picosecond laser processing achieves high precision and high efficiency of micro-processing on a variely of materials due to its special properlies such as ＂cold processing＂, high repetition rate and high pulse energy, etc. A wide range of applications and prospects are shown for picosecond laser application in fields of precision machinery, surface engineering, and biomedicine, etc. In the paper, the research progress of the picosecond laser is reviewed in the nficro-hole processing,cutting and scribing of metal sheets and hard and brittle materials as well as the surface modification of materials such as strontium titanate and zirconia, and a discussion is made about the existing problems and development direction in picosecond laser processing from the aspect of process parameters optinfization and the improvement of ancillaryequipment, etc.

关 键 词：激光材料加工 皮秒激光 微加工 表面改性 

分 类 号：TN249[电子电信—物理电子学]