一种基于超材料的常温太赫兹探测器  

An Uncooled Terahertz Detector Using Metamaterial

作　　者：郑发明 任伟[1,2] 吴伟[1,2] 郭聪[1,2] 柳克银 陶虎 李昕欣[3] 周志涛[3] Zheng Faming;Ren Wei;Wu Wei;Guo Cong;Liu Keyin;Tao Hu;Li Xinxin;Zhou Zhitao(a.Department of Physics,College of Sciences,b.International Centre for Quantum and Molecular Structures,Shanghai University,Shanghai 200444,China;Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China)

机构地区：[1]上海大学理学院物理系,上海200444 [2]上海大学量子与分子结构国际中心,上海200444 [3]中国科学院上海微系统与信息技术研究所,上海200050

出　　处：《微纳电子技术》2018年第11期777-782,788,共7页Micronanoelectronic Technology

摘　　要：基于超材料结构设计、制造并表征了一款工作在2.5THz频率下的常温太赫兹探测器,该探测器上电场耦合电感电容（ELC）结构的超材料谐振子阵列吸收太赫兹辐射后,将电磁能转换为热能,温度升高后引起超材料谐振子结构中铂金属环的电阻变化,通过检测阻值变化实现对太赫兹波的电学读取探测。将该探测器集成到通过MEMS工艺制作的微悬臂梁绝热结构上,实现了较好的隔热效果,从而提高了探测器的响应率。通过太赫兹时域光谱仪（THzTDS）测试该探测器的透射谱,验证了该探测器的吸收峰为2.5THz,达到了设计要求。进一步测试结果显示,该探测器在2.5THz工作频率下的响应率达到2.149×10^5Ω/W,滚降频率达到10Hz。The uncooled THz detector at 2.5 THz was designed,fabricated and characterized using metamaterial structures.The metamaterial unit cell array with the electric-inductor-capacitor（ELC）structure on the detector absorbed the terahertz radiation,and transformed the electromagnetic energy into the thermal energy.The resistance of the platinum ring in the metamaterial unit cell structure was changed by the increase of the temperature.Thus the electrically readout and detection of the terahertz wave was achieved by detecting the resistance change.The detector was integrated into the micro cantilever adiabatic structure fabricated by MEMS technology,and the good heat insulation effect was achieved,then the responsivity of the detector was improved.A terahertz time-domain spectrometer（THz TDS）was used to measure the transmission spectrum of the detector.The transmission spectrum indicates that the absorption peak of the detector is 2.5 THz and the design requirement is met.The further measurement results show that the responsivity of the detector reaches 2.149×105Ω/W and the roll-off frequency reaches 10 Hz at the operating frequency of 2.5 THz.

关 键 词：太赫兹探测器 超材料 电学读取 绝热结构 太赫兹时域光谱仪(THz TDS) 

分 类 号：TL814[核科学技术—核技术及应用]