高矫顽力NdFeB永磁薄膜的研究进展  

Research progress on NdFeB permanent magnetic thin film with high coercivity

作　　者：刘文峰[1] 张敏刚[1] 张克维[1] 柴跃生[1] LIU Wen-feng;ZHANG Min-gang;ZHANG Ke-wei;CHAI Yue-sheng(School of Materials Science and Engineering,institute of Advanced Materials,Taiyuan University of Science and Technology,Taiyuan 030024,China)

机构地区：[1]太原科技大学材料科学与工程学院先进材料研究所,山西太原030024

出　　处：《磁性材料及器件》2018年第6期52-57,共6页Journal of Magnetic Materials and Devices

基　　金：山西省回国留学人员科研资助项目(2017-085;2013-098);山西省留学回国人员科技活动择优资助项目(2015003);山西省高等学校科技创新项目(2013133);山西省研究生联合培养基地人才培养项目(2016JD36)

摘　　要：NdFeB永磁材料具有优异的性能而广泛应用于各种电子器件及系统中。电子器件及系统的微型化要求NdFeB永磁材料薄膜化,而绿色经济和低碳经济的发展又扩大了对高矫顽力NdFeB永磁薄膜的需求。综合介绍了NdFeB永磁薄膜的制备方法,着重论述了磁控溅射法制备高矫顽力Nd FeB永磁薄膜的研究进展,最后展望了高矫顽力NdFeB薄膜研究未来的发展方向。NdFeB permanent magnetic materials have been widely applied in electronic devices and systems due to their excellent performance. With the miniaturization of electronic devices and systems, the demand for NdFeB permanent magnetic fihn becomes stronger. Meanwhile, the development of green and low-carbon economy requires higher coercivity of NdFeB permanent magnet film. In this paper, the preparation methods of NdFeB permanent magnet film are introduced, the research progress ofmagnetron sputtering high coercivity NdFeB fihn is emphatically discussed, and finally the future of high coercivity NdFeB film is prospected.

关 键 词：NdFeB永磁薄膜 高矫顽力 制备方法 磁控溅射 

分 类 号：TM273[一般工业技术—材料科学与工程] O484.43[电气工程—电工理论与新技术]