液体静压丝杠驱动的超精密运动系统设计与实验研究  

Design and Experimental Study on Ultra Precision Linear Motion System Driven by Hydrostatic Screw

作　　者：刘远航 王波[1] 乔政[1] 吴言功 刘长江 LIU Yuan-hang;WANG Bo;QIAO Zheng(College of Mechanical and Electrical Engineering,Harbin Institute of Technology,Harbin 150001)

机构地区：[1]哈尔滨工业大学机电工程学院,哈尔滨150001

出　　处：《航空精密制造技术》2018年第5期14-18,共5页Aviation Precision Manufacturing Technology

摘　　要：本文设计了液体静压丝杠驱动的超精密直线运动系统,完成了机械结构、控制系统装配与搭建;通过实验表明液体静压丝杠驱动的运动系统能够达到10nm运动分辨率(反馈分辨率5nm),具有良好的刚度特性、稳态特性以及动态跟踪特性,适合作为超精密加工设备的驱动装置。The ultra-precision linear motion system driven by hydrostatic screw was designed. After finishing assembly and construction of the mechanical structure and control system, the experiments showed that the motion system driven by hydrostatic screw can achieve 10 nm motion resolution under the condition of 5 nm feedback resolution. The hydrostatic screw driving system has good stiffness, steady state and dynamic tracking characteristics. It＇s a suitable driving device for ultra-precision machine tools.

关 键 词：超精密加工 液体静压丝杠 液体静压导轨 运动分辨率 

分 类 号：TH115[机械工程—机械设计及理论]