MFC在真空镀膜机上的应用研究  

Application of MFC in vacuum coating machine

作　　者：王宠[1] 张士强[1] Wang Chong;Zhang Shiqiang(China lucky Group Corporation,Hebei Baoding,071054)

机构地区：[1]中国乐凯集团有限公司,河北保定071054

出　　处：《信息记录材料》2018年第11期1-3,共3页Information Recording Materials

摘　　要：本文主要对质量流量控制器(MFC)在真空镀膜机上的应用进行了研究,尤其是MFC对液体的蒸汽流量控制时展开了研究,并以镀膜用原材料六甲基硅氧烷(HMDSO)为例,对MFC的系统温度、工作压差两个重要条件进行了详细阐述。This paper focuses on the mass flow controller（MFC） used in the vacuum coating machine are studied, especially the MFC steam flow control of liquid is Studied,and the preparation of film with the raw materials of the Hexamethyldisiloxane（HMDSO） as an example,the two important conditions of MFC system temperature and working pressure in detail.

关 键 词：质量流量控制器(MFC) 真空镀膜机 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]