圆盘式石英谐振器集群力频传感特性分析  

Analysis on force-frequency sensing characteristics of circular quartz resonator cluster

作　　者：陈福彬[1,2] 田文杰 高锦春[2] 葛毅[3] CHEN Fubin1,2, TIAN Wenjie1, GAO Jinchun2, GE Yi3(1. Sensor key laboratory, Beijing Information Science and Technology University, Beijing 100101, China; 2. School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China; 3. Tianjin Navigation Instrument Research Institute, Tianjin 300131, China)

机构地区：[1]北京信息科技大学传感器重点实验室,北京100101 [2]北京邮电大学电子工程学院,北京100876 [3]天津航海仪器研究所,天津300131

出　　处：《中国惯性技术学报》2018年第4期464-469,共6页Journal of Chinese Inertial Technology

基　　金：北京市自然科学基金(KZ201511232037)

摘　　要：石英晶体谐振器的力频效应在传感器方面有重要的应用,针对传统石英晶体谐振器力灵敏度偏低,以及温度变化等因素引起的频率漂移等难题,提出了一种在基于同一石英基片上的力敏谐振器集群。通过弹性力学方法理论推导和计算了石英晶体薄圆片受径向力作用时片内各点的应力分布,得到石英晶体谐振器圆盘内各点的力频特性,建立了石英谐振器集群力传感系统。实验结果表明石英谐振器集群力频灵敏度系数达到7333 Hz/N,力敏特性明显优于传统的单电极谐振器,该石英谐振器集群可以作为敏感元件应用于力(或应力)检测以及惯性传感器等数字式测控领域。The force-frequency effect of quartz crystal resonator has an important application in sensors. However, the frequency drift caused by temperature changes and other factors, and the lower force sensitivity of the quartz crystal resonators, are always problems in the applications. A cluster of multiple force-sensitive resonators with the same quartz substrate are proposed. Based on the elastic mechanics method, the stress distribution in the circular quartz wafer subjected to radial force is derived and calculated, and the force-frequency characteristics of each point in the disk are obtained, and then a force sensing system for resonator cluster is developed. Experimental results show that the sensitivity coefficient of the force-frequency reaches 7333 Hz/N, and the sensitivity of the quartz resonator cluster is obviously better than that of the traditional single electrode resonator. The quartz resonator cluster can be used as a sensitive element of the force（or stress） detection and digital inertial sensors in the field of modern digital measurement and control.

关 键 词：石英谐振器集群 力频传感特性 惯性传感器 

分 类 号：TH703[机械工程—仪器科学与技术]