占空比对脉冲电弧离子镀AlCrSiN涂层热稳定性和抗氧化性的影响  

Effects of Duty Cycle on Thermal Stability and Oxidation Resistance of AlCrSiN Coatings Deposited by Pulsed Arc Ion Plating

作　　者：钟星 王启民[1] 许雨翔 伍一铭 莫锦君 吴正涛[1] ZHONG Xing;WANG Qimin;XU Yuxiang;WU Yiming;MO Jinjun;WU Zhengtao(School of Electromeehanical Engineering,Guangdong University of Technology,Guangzhou 510006,China)

机构地区：[1]广东工业大学机电工程学院,广州510006

出　　处：《中国表面工程》2018年第5期99-107,共9页China Surface Engineering

基　　金：国家自然科学基金(51522502;51875109;51801032);广州市科技计划(201704030129)~~

摘　　要：采用脉冲和直流电弧离子镀技术制备AlCrSiN涂层,研究占空比对涂层结构和性能的影响。采用扫描电镜观测涂层的生长形貌和化学成分,利用XRD分析涂层的相组成,结合光电子能谱技术分析涂层中元素化学键价,并通过纳米压痕法检测涂层的硬度和弹性模量。此外,对涂层进行真空退火和氧化处理,以评价涂层的高温结构和力学稳定性以及抗氧化性。结果表明:AlCrSiN涂层均为非晶Si3N4包裹纳米晶(Al, Cr)N的纳米复合结构;脉冲电弧沉积可以改善涂层的表面质量、提高组织致密性和硬度。占空比为1%时,AlCrSiN涂层具有最小的表面粗糙度(47 nm)和最高的硬度(31.5 GPa)。AlCrSiN涂层具有良好的热稳定性,950℃退火后其硬度仍高于30 GPa。AlCrSiN涂层的抗氧化温度超过1000℃;占空比的增加涂层的抗氧化性略有提升。AlCrSiN coatings were deposited using pulsed and DC arc ion plating, respectively. The effect of the duty cycle on the structure and properties of the coating were investigated. The growth morphology and chemical composition of the coatings were analyzed by scanning electron microscopy. Phase composition and chemical bond valence were further examined by XRD and X-ray photoelectron spectroscopy, respectively. The hardness and elastic modulus of the coatings were derived from nanoindentation. In addition, AlCrSiN coatings were vacuum annealed and oxidized to evaluate their high- temperature structural/mechanical stability and oxidation resistance, respectively. All AlCrSiN coatings exhibit a nanocomposite structure with nanocrystalline （Al, Cr）N enveloped by amorphous Si3N4. Pulsed arc deposition can improve the surface quality and increase the compactness and hardness of the coatings. With a duty cycle of 1%, the AlCrSiN coating has the smallest surface roughness （47 nm） and the highest hardness （31.5 GPa）. Moreover, the AlCrSiN coatings have good thermal stability and can remain a hardness above 30 GPa after annealing at 950℃. The oxidation resistance of AlCrSiN coatings exceeds 1000℃, and the oxidation resistance is slightly improved with the increase of the duty cycle

关 键 词：AlCrSiN 占空比 硬度 热稳定性 抗氧化性 

分 类 号：TG174.444[金属学及工艺—金属表面处理]