结露传感器敏感机理的频谱特性分析  

Analysis of Spectral Characteristics on Sensitive Mechanism of Dew Sensors

作　　者：梁鸿东[1] 梁海燕 彭智伟[1] 刘志宇[1] 傅刚[1] LIANG Hong-dong;LIANG Hai-yan;PENG Zhi-wei;LIU Zhi-yu;FU Gang(School of Physics and Electronic Engineering,Guangzhou University,Guangzhou,510006,Guangdong,China)

机构地区：[1]广州大学物理与电子工程学院,广东广州510006

出　　处：《山西师范大学学报（自然科学版）》2018年第4期48-51,共4页Journal of Shanxi Normal University(Natural Science Edition)

摘　　要：实验制备并测量了结露型湿度传感器在不同湿度下的复阻抗特性曲线,分析了器件电阻和电容值随频率的变化,获得相应的等效电路并根据测量数据计算了等效电路中各元件的参数,由此得到器件参数在不同湿度下的最大影响因素并据此分析其敏感机理.结果表明,结露传感器在低湿区的电阻主要来源于导电颗粒电阻和颗粒间界面电阻,在高湿区是颗粒间界面电阻以及电极与湿敏膜之间的接触电阻起主要作用,而在结露区则取决于电极与湿敏膜之间的接触电阻.Dew-type humidity sensor was prepared,and complex impedance characteristic curve was measured under different humidity. The resistance and capacitance VS frequency were analyzed. The corresponding equivalent circuit was obtained and the components of the equivalent circuit were calculated according to the measured data. The most influence factors of the device parameters under different humidity were obtained and the sensitive mechanism was analyzed. The results showed that the dew-type sensor in the low humidity resistance mainly came from conductive particles and the interface resistance among the particles,in high humidity the resistance the interface resistance of the particles and the contact resistance between electrodes and humidity sensitive film were playing the main role. But the resistance in the dew zone depended on the contact resistance between the electrode and humidity sensitive film.

关 键 词：结露传感器 复阻抗图 等效电路 敏感机理 

分 类 号：TN304.52[电子电信—物理电子学]