大范围二维纳米位移台的控制及非线性校准的实验研究  

Experimental Research on the Control and Non-linear Calibration of Large-scale Two-dimensional Nanometer Displacement Stage

作　　者：周奇 刘炳锋 连笑怡 陈本永[1] 黄鹭[2] 李琪[2] 高思田[2] ZHOU Qi;LIU Bing-feng;LIAN Xiao-yi;CHEN Ben-yong;HUANG Lu;LI Qi;GAO Si-tian(School of Mechanical Engineering and Automation,Zhejiang Sci-tech University,Hangzhou,Zhejiang 310018,China;School of Instrumentation Science and Opto-electronics Engineering,Beijing Information Science ＆ Technology University,Beijing 100192,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]浙江理工大学机械与自动控制学院,浙江杭州310018 [2]中国计量科学研究院,北京100029 [3]北京信息科技大学仪器科学与光电工程学院,北京100192

出　　处：《计量学报》2018年第6期771-776,共6页Acta Metrologica Sinica

基　　金：国家重点研发计划(2016YFF0200602;2016YFA0200901);北京信息科技大学2017年-2018年度“实培计划”.

摘　　要：搭建了基于激光干涉仪测量原理的三轴微位移测量系统,对大范围二维纳米位移台的控制及非线性校准进行实验研究。介绍了双频激光干涉仪测量系统的构成;编写了纳米位移台的控制程序和激光干涉仪数据采集程序;阐述了位移台的非线性校准方法,并通过实验对比了多项式三阶拟合和三阶分段拟合的差别,验证了校准方法的准确性。实验表明:使用三阶分段拟合的校准方法效果更好,校准前,x轴的最大非线性误差为4. 052μm,y轴的最大非线性误差为2. 927μm;校准后,x轴的最大非线性误差为15 nm,y轴的最大非线性误差为17 nm,仅为原始非线性误差的1%。To study the control and non-linear correction of a large-scale two-dimensional nanometer displacement stage, a micro-displacement measurement system which based on the measurement principle of a laser interferometer was setted up. The composition of the dual-frequency laser interferometer measurement system was introduced, the control program of nanometer displacement stage and data acquisition program of laser interferometer were programmed. The non-linear calibration method was described, the polynomial third-order fitting and the third-order were compared through experiments. Experiments show that the calibration method using third-order piecewise fitting is better than third-order. Before calibration, the maximum nonlinearity error of x-axis and y-axis is 4. 052 μm and 2. 927 μm. After calibration, the maximum non-linearity of the x-axis is 15 nm and the maximum nonlinearity error of the y-axis is 17 nm, which is only 1% of the original nonlinearity error.

关 键 词：计量学 纳米位移台 非线性校准 激光干涉仪 

分 类 号：TB92[一般工业技术—计量学]