环保型柠檬酸盐体系镀铜工艺  

Process of Environment-Friendly Copper Electroplating in Citrate Bath

作　　者：陈海燕 冯伟莹[1] 张琛[1] 李翠翠 CHEN Haiyan;FENG Weiying;ZHANG Chen;LI Cuicui(State Key Laboratory of Environmental Criteria and Risk Assessment,Chinese Research Academy of Environmental Sciences,Beijing 100012,China)

机构地区：[1]中国环境科学研究院环境基准与风险评估国家重点实验室,北京100012

出　　处：《电镀与环保》2018年第6期1-4,共4页Electroplating & Pollution Control

基　　金：国家自然科学基金项目(41630645;41521003;41703115)

摘　　要：采用安时-质量法、目测法、白光干涉轮廓仪和X射线衍射仪,考察了工艺条件对环保型柠檬酸盐体系镀铜工艺中电流效率、镀铜层外观形貌及晶体结构的影响。结果表明:镀液温度和搅拌方式对电流效率有比较明显的影响,而电流密度对电流效率影响不大。在镀液温度45℃、电流密度3A/dm2、超声波搅拌的条件下,电流效率达到80.20%,可以得到表面比较平整、呈半光亮的镀铜层。镀铜层的XRD图谱中出现五个衍射峰——(111)、(200)、(220)、(311)、(222)。只改变搅拌方式对镀铜层的晶体结构影响不大。The influence of process conditions on the current efficiency, appearance and crystal structure of copper coating prepared in citrate bath was investigated by ampere hour weight method, ocular estimate method, white light interferometric and X ray diffractometer. The results showed that bath temperature and agitation method have an obvious effect on the current efficiency, while current density has little influence on the current efficiency. The current efficiency was 80.20% and an even and semi bright copper coating was obtained using process conditions of bath temperature 45℃ , current density 3 A/dm2 and ultrasonic agitation. The XRD pattern of copper coating showed five peaks （111）, （200）, （220）, （311） and （222）. Agitation method has little influence on the crystal structure of copper coating.

关 键 词：镀铜 柠檬酸盐体系镀液 电流效率 外观形貌 晶体结构 

分 类 号：TQ153[化学工程—电化学工业]