限流元件流导测量技术研究进展  

RESEARCH ON MEASUREMENT METHOD FOR ORIFICE CONDUCTANCE

作　　者：张琦[1] 李得天[1] 杨长青[1] 成永军[1] 赵澜[1] 吉康[1] 孙健[1] ZHANG Qi;LI De-tian;YANG Chang-qing;CHEN Yong-jun;ZHAO Lan;JI Kang;SUN Jian(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2017年第2期76-81,共6页Vacuum and Cryogenics

基　　金：国家自然科学基金(61540043;61471184)

摘　　要：在真空技术应用中,限流元件流导主要用于气体微流量计微小气体流量的产生、提供真空室动态标准压力及真空漏孔的校准。目前测量限流元件流导的方法主要有恒压法、定容法、流量比较法、线性规法、升压法。文章介绍了国内外测量限流元件流导的常用方法,列举了各种测量方法的适用范围和限制因素,并对比不同测量方法的特点。In the application of vacuum technology,flow limiting element conductance is mainly used for producingtiny gas flow of gas micro-flow meter,providing standard dynamic pressure for vacuum system and calibration of vacuumleak.Measurement methods for orifice conductance consist of constant pressure method,constant volume method,flowcomparison method,linear vacuum gauge method and pressure increasing method.This article introduces the applicablescope of four commonly used methods.The application of various measurement methods and their restrictions are enumerated,and compares the characteristics of different measurement methods.

关 键 词：计量学 气体微流量计 限流元件流导 测量方法 

分 类 号：TB771[一般工业技术—真空技术]