一种补偿测量机z向运动平行度误差的方法  

A Method for Compensating the z Motion Parallelism Error of CMM

作　　者：武太文[1] 高国防[1] 刘书桂[2] 赵伟[1] 张国雄[2] Wu Taiwen;Gao Guofang;Liu Shugui;Zhao Wei;Zhang Guoxiong(Institute of Chemical Materials,China Academy of Engineering Physics,Mianyang 621900,China;State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China)

机构地区：[1]中国工程物理研究院化工材料研究所,绵阳621900 [2]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《天津大学学报（自然科学与工程技术版）》2017年第5期536-539,共4页Journal of Tianjin University：Science and Technology

摘　　要：针对一台在连续转动过程中利用内外两个测量架同时测量内外表面的三坐标测量机,研究了其误差补偿.研究中发现在空间不同高度处测量结果出现较大差异的主要原因是内外测量轴的z向运动轴线与回转轴线之间的不平行.为了提高测量精度,设计了一种具有上下两个标准环的标定装置,根据两个标准环的测量结果对热误差及其引起的z向运动平行度误差进行补偿.为了减小温度变化的影响,在每天开机时或温变较大时,进行一次自动标定.实验结果表明,该方法有效地减小了上述误差,将不同高度间测量数据偏差控制在0.015,mm以内,满足了测量机使用要求.The error compensation is researched for a coordinate measuring machine(CMM)that uses interal and externalmeasurement frames to measure the interal surface and external surfaces in continuous rotation.Studies show thatparallelism errors between the z motion axis of the measurement frames and the axis of rotary table were the mainreason for deviations of data at different heights.A calibration device having two standard rings at different heightswas designed to improve measurement accuracy.And measurement data of the two standard rings were used to compensatethe thermal error and z-axis parallelism errors caused by the thermal error.Auto-calibration would be executedafter system start-up or under obvious temperature changes to reduce the adverse effect of temperature variation.Results show that this method can reduce above-mentioned errors effectively.And the deviations of data at differentheights could be kept within0.015,mm,meeting the requirement for the CMM application.

关 键 词：回转测量 误差补偿 平行度误差 自动标定 三坐标测量机 

分 类 号：TP202.2[自动化与计算机技术—检测技术与自动化装置]