酸腐蚀优化YIG薄膜表面及磁性能研究  

Surface microstructure and magnetic properties of YIG films optimized by acid corrosion

作　　者：冯奇[1] 郑辉[1] 郑鹏[1] 徐建定 陈娟景 郑梁[1] FENG Qi;ZHENG Hui;ZHENG Peng;XU Jianding;CHEN Juanjing;ZHENG Liang(Hangzhou Dianzi University, Hangzhou 310018, China;Zhejiang TongDa Magnet Industry Co.,Ltd, Jiaxing 314407, Zhejiang Province, China)

机构地区：[1]杭州电子科技大学,浙江杭州310018 [2]浙江通达磁业有限公司,浙江嘉兴314407

出　　处：《电子元件与材料》2017年第8期60-63,共4页Electronic Components And Materials

基　　金：浙江省科技计划项目资助(No.2017C31019)

摘　　要：主要针对射频磁控溅射法所制备的钇铁石榴石铁氧体薄膜,利用盐酸溶液对其表面进行腐蚀处理,探究腐蚀时间对薄膜表面微观结构及磁性能的影响。研究发现随着腐蚀时间的延长,薄膜表面粗糙度先减小后增大,并在腐蚀5 min时得到最小的算术平均粗糙度3 nm及最小的轮廓最大高度0.045?m。同时扫描电子显微镜表征出薄膜表面形貌在腐蚀时间5 min时趋于光滑均匀。最后铁磁共振谱反映出在腐蚀时间5 min时共振峰个数最少,铁磁共振线宽也有所降低。通过酸腐蚀处理技术,薄膜表面形貌及磁性能均得到改善,使其更适用于微波器件中。Yttrium-iron-garnet ferrite films were etched by hydrochliric acid solution,which were prepared by RF magnetron sputtering.The effect of corrosion time on the microstructure and magnetic properties was investigated.It is observed that the surface roughness of films decreases first and then increases with the corrosion time.And it obtains3nm of minimum arithmetic mean roughness and0.045?m of the lowest maximum height of the profile under corrosion for5min.In addition,scanning electron microscopy result shows that the morphology of film surface becomes smooth and uniform under corrosion for5min.Finally,the ferromagnetic resonance spectrum reflects that it obtains the lowest number of peaks under corrosion for5min.Ferromagnetic resonance linewidth is also reduced under this condition.In short,the surface morphology and the magnetic properties of film are improved by this acid corrosion treatment technology,which is more suitable for using in microwave devices.

关 键 词：铁氧体薄膜 铁磁共振 酸腐蚀 粗糙度 磁控溅射 钇铁石榴石 

分 类 号：O484[理学—固体物理]