碳纳米管阴极电离真空计研制及其性能研究  

THE FABRICATION AND RESEARCH OF IONIZATION GAUGE BASED ON CARBON NANOTUBE CATHODE

作　　者：张虎忠[1] 成永军[1] 王永军[1] 孙健[1] 习振华[1] 李得天[1] ZHANG Hu-zhong;CHENG Yong-jun;WANG Yong-jun;SUN Jian;XI Zhen-hua;LI De-tian(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2017年第4期212-216,共5页Vacuum and Cryogenics

基　　金：国家自然科学基金(No.61601211;No.61671266;61471184)

摘　　要：碳纳米管阴极电离真空计在超高/极高真空测量中具有广阔应用前景,基于碳纳米管阴极研制了测量范围10-9~10-4Pa的电离真空计,真空规管包括了碳纳米管阴极、门极、阳极、反射极和收集极,电路控制系统由高压电源、微弱离子流测量和控制电路组成。实验研究结果表明,不锈钢衬底上直接生长制备的碳纳米管阴极性能良好,开启场强和阈值场强分别为1.9 V/μm和3.9 V/μm,当阳极电流为42μA时,碳纳米管阴极电离真空计本底干扰可降低到1.81×10-9Pa。The ionization gauge based on carbon nanotube(CNT)cathode has a broad application prospect in ultrahigh and extreme high vacuum measurement.The gauge which can measure the pressure from10-9Pa to10-4Pa has been developed.The gauge consists of CNT cathode,gate,anode,reflector and collector.And the electric controller is composed of high voltage power,weak current transmission and control circuits.The experimental results show that the CNT nanotube cathode prepared on the stainless steel substrate has shown a good performance.The turn on and threshold electric fields for CNT array grown on stainless steel substrate were1.9V/μm and3.9V/μm respectively.The residual current of the gauge can be reduced to1.81×10-9Pa while the anode current is42μA.

关 键 词：真空测量 电离真空计 碳纳米管阴极 场发射 

分 类 号：TB772[一般工业技术—真空技术]